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Noriaki Kanaya
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Tokyo, JP
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last 30 patents
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Patent Grant
Semiconductor manufacturing system, control device, and control method
Patent number
11,681,268
Issue date
Jun 20, 2023
Tokyo Electron Limited
Kenichi Kobayashi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
INFORMATION PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220291662
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Hiroshi OGINO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM, CONTROL DEVICE, AND CONTROL METHOD
Publication number
20220066418
Publication date
Mar 3, 2022
TOKYO ELECTRON LIMITED
Kenichi KOBAYASHI
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF MANAGING APPARATUS...
Publication number
20100087944
Publication date
Apr 8, 2010
TOKYO ELECTRON LIMITED
Noriaki Kanaya
G05 - CONTROLLING REGULATING