Noriaki Koyama

Person

Oshu-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor system
- Patent number 11,822,319
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Noriaki Koyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing system and method for monitoring process data
- Patent number 11,567,485
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Nobutoshi Terasawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Abnormality detection apparatus
- Patent number 10,734,291
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Noriaki Koyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Group management system and recording medium
- Patent number 9,703,284
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Noriaki Koyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Server device of group management system having function of perform...
- Patent number 8,355,808
- Issue date Jan 15, 2013
- Tokyo Electron Limited
- Takumi Inokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Server and program
- Patent number 8,190,283
- Issue date May 29, 2012
- Tokyo Electron Limited
- Takumi Inokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Life estimating method for heater wire, heating apparatus, storage...
- Patent number 8,121,799
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Server device and program
- Patent number 8,055,391
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Server device and program with sub-recipe measurement communication
- Patent number 7,974,729
- Issue date Jul 5, 2011
- Tokyo Electron Limited
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat system, heat method, and program
- Patent number 7,896,649
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Noriaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information processing apparatus, semiconductor manufacturing syste...
- Patent number 7,869,888
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Noriaki Koyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor manufacturing apparatus, method of detecting abnormal...
- Patent number 7,751,921
- Issue date Jul 6, 2010
- Tokyo Electron Limited
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR SYSTEM
- Publication number 20210043459
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Noriaki Koyama
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA
- Publication number 20210011468
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Nobutoshi TERASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ABNORMALITY DETECTION APPARATUS
- Publication number 20180138096
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Noriaki Koyama
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR SYSTEM
- Publication number 20180040484
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Noriaki Koyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GROUP MANAGEMENT SYSTEM AND RECORDING MEDIUM
- Publication number 20150045942
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Noriaki KOYAMA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...
- Publication number 20120169505
- Publication date Jul 5, 2012
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
- Publication number 20110035165
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Noriaki KOYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SERVER DEVICE AND PROGRAM
- Publication number 20090276076
- Publication date Nov 5, 2009
- TOKYO ELECTRON LIMITED
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Application
SERVER DEVICE AND PROGRAM
- Publication number 20090265027
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Application
SERVER AND PROGRAM
- Publication number 20090177308
- Publication date Jul 9, 2009
- TOKYO ELECTRON LIMITED
- Takumi Inokawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SERVER AND PROGRAM
- Publication number 20090138118
- Publication date May 28, 2009
- TOKYO ELECTRON LIMITED
- Takumi Inokawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Life estimating method for heater wire, heating apparatus, storage...
- Publication number 20080262791
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Heat system, heat method, and program
- Publication number 20080213716
- Publication date Sep 4, 2008
- Noriaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...
- Publication number 20080208385
- Publication date Aug 28, 2008
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
- Publication number 20070282554
- Publication date Dec 6, 2007
- TOKYO ELECTRON LIMITED
- Noriaki KOYAMA
- G05 - CONTROLLING REGULATING

Noriaki Koyama

Person

Patents Grantslast 30 patents

Semiconductor system

Substrate processing system and method for monitoring process data

Abnormality detection apparatus

Group management system and recording medium

Server device of group management system having function of perform...

Server and program

Life estimating method for heater wire, heating apparatus, storage...

Server device and program

Server device and program with sub-recipe measurement communication

Heat system, heat method, and program

Information processing apparatus, semiconductor manufacturing syste...

Semiconductor manufacturing apparatus, method of detecting abnormal...

Patents Applicationslast 30 patents

SEMICONDUCTOR SYSTEM

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA

ABNORMALITY DETECTION APPARATUS

SEMICONDUCTOR SYSTEM

GROUP MANAGEMENT SYSTEM AND RECORDING MEDIUM

LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...

INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...

SERVER DEVICE AND PROGRAM

SERVER DEVICE AND PROGRAM

SERVER AND PROGRAM

SERVER AND PROGRAM

Life estimating method for heater wire, heating apparatus, storage...

Heat system, heat method, and program

Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...

INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...