Noriaki Matsushima

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Conductor treating single-wafer type treating device and method for...
- Patent number 7,235,137
- Issue date Jun 26, 2007
- Tokyo Electron Limited
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS TREATMENT APPARATUS
- Publication number 20090250008
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Noriaki Matsushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Conductor treating single-wafer type treating device and method for...
- Publication number 20040097088
- Publication date May 20, 2004
- Hirofumi Kitayama
- C30 - CRYSTAL GROWTH