Noriaki Mizuno

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Disk-shaped workpiece washing apparatus
- Patent number 6,618,889
- Issue date Sep 16, 2003
- Speedfam Clean System Co., Ltd
- Yoshinobu Terui
- G11 - INFORMATION STORAGE
Information Patent Grant
Apparatus of and method for polishing the outer circumferential por...
- Patent number 6,478,660
- Issue date Nov 12, 2002
- Speedfam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Single-side polishing method for substrate edge, and apparatus ther...
- Patent number 6,402,596
- Issue date Jun 11, 2002
- SpeedFam-IPEC Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS OF AND METHOD FOR POLISHING THE OUTER CIRCUMFERENTIAL POR...
- Publication number 20020137439
- Publication date Sep 26, 2002
- Shunji Hakomori
- B24 - GRINDING POLISHING