Noriaki NAKAYAMADA

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 11,961,708
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method, charged particle beam writing...
- Patent number 11,804,361
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method and multi charged particle beam writ...
- Patent number 11,789,372
- Issue date Oct 17, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,774,860
- Issue date Oct 3, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method and multi charged particle beam writ...
- Patent number 11,327,408
- Issue date May 10, 2022
- NuFlare Technology, Inc.
- Kenichi Yasui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,199,781
- Issue date Dec 14, 2021
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation method, electron beam irradiation apparat...
- Patent number 10,950,413
- Issue date Mar 16, 2021
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drawing data generating method
- Patent number 10,685,435
- Issue date Jun 16, 2020
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus and positional displacement correct...
- Patent number 10,410,830
- Issue date Sep 10, 2019
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and positional displacement correcting meth...
- Patent number 10,236,160
- Issue date Mar 19, 2019
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 10,032,603
- Issue date Jul 24, 2018
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method, and charged particle beam wri...
- Patent number 9,852,885
- Issue date Dec 26, 2017
- NuFlare Technology, Inc.
- Mizuna Suganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and drawing data generation...
- Patent number 9,779,913
- Issue date Oct 3, 2017
- NuFlare Technology, Inc.
- Shigehiro Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, and charged particle beam...
- Patent number 9,484,185
- Issue date Nov 1, 2016
- NuFlare Technology, Inc.
- Mizuna Suganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
- Patent number 9,336,988
- Issue date May 10, 2016
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 9,268,234
- Issue date Feb 23, 2016
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and method for acquiring do...
- Patent number 9,224,578
- Issue date Dec 29, 2015
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam lithography apparatus, inspection apparatus a...
- Patent number 9,164,044
- Issue date Oct 20, 2015
- NuFlare Technology, Inc.
- Shigehiro Hara
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,563,953
- Issue date Oct 22, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam pattern forming apparatus and charged particl...
- Patent number 8,502,175
- Issue date Aug 6, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and method thereof
- Patent number 8,178,856
- Issue date May 15, 2012
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam writing method and charged-particle beam writ...
- Patent number 8,129,698
- Issue date Mar 6, 2012
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM WRITING METHOD, ELECTRON BEAM WRITING APPARATUS, AND...
- Publication number 20240412945
- Publication date Dec 12, 2024
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...
- Publication number 20230290608
- Publication date Sep 14, 2023
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
- Publication number 20230029715
- Publication date Feb 2, 2023
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...
- Publication number 20220384142
- Publication date Dec 1, 2022
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WRITING DATA GENERATING METHOD AND MULTI CHARGED PARTICLE BEAM WRIT...
- Publication number 20220221800
- Publication date Jul 14, 2022
- NuFlare Technology, Inc.
- Kenichi YASUI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...
- Publication number 20220100099
- Publication date Mar 31, 2022
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
- Publication number 20210241995
- Publication date Aug 5, 2021
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...
- Publication number 20200278612
- Publication date Sep 3, 2020
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WRITING DATA GENERATING METHOD AND MULTI CHARGED PARTICLE BEAM WRIT...
- Publication number 20200117095
- Publication date Apr 16, 2020
- NuFlare Technology, Inc.
- Kenichi YASUI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON BEAM IRRADIATION METHOD, ELECTRON BEAM IRRADIATION APPARAT...
- Publication number 20190362937
- Publication date Nov 28, 2019
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND POSITIONAL DISPLACEMENT CORRECT...
- Publication number 20180090299
- Publication date Mar 29, 2018
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS AND POSITIONAL DISPLACEMENT CORRECTING METH...
- Publication number 20180090298
- Publication date Mar 29, 2018
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, AND CHARGED PARTICLE BEAM WRI...
- Publication number 20170278672
- Publication date Sep 28, 2017
- NuFlare Technology, Inc.
- Mizuna SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING DATA GENERATING METHOD
- Publication number 20170193650
- Publication date Jul 6, 2017
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20170069460
- Publication date Mar 9, 2017
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...
- Publication number 20160284510
- Publication date Sep 29, 2016
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
- Publication number 20160148785
- Publication date May 26, 2016
- NuFlare Technology, Inc.
- Mizuna SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
- Publication number 20150206709
- Publication date Jul 23, 2015
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR ACQUIRING DO...
- Publication number 20140291553
- Publication date Oct 2, 2014
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20130316288
- Publication date Nov 28, 2013
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...
- Publication number 20130264478
- Publication date Oct 10, 2013
- NuFlare Technology, Inc.
- Shigehiro HARA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...
- Publication number 20130032707
- Publication date Feb 7, 2013
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120068089
- Publication date Mar 22, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...
- Publication number 20120007002
- Publication date Jan 12, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...
- Publication number 20110121208
- Publication date May 26, 2011
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF
- Publication number 20110031387
- Publication date Feb 10, 2011
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRIT...
- Publication number 20090242787
- Publication date Oct 1, 2009
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY

Noriaki NAKAYAMADA

Person

Patents Grantslast 30 patents

Charged particle beam writing apparatus, charged particle beam writ...

Charged particle beam writing method, charged particle beam writing...

Writing data generating method and multi charged particle beam writ...

Writing data generating method, multi charged particle beam writing...

Writing data generating method and multi charged particle beam writ...

Writing data generating method, multi charged particle beam writing...

Electron beam irradiation method, electron beam irradiation apparat...

Drawing data generating method

Charged particle beam apparatus and positional displacement correct...

Electron beam apparatus and positional displacement correcting meth...

Charged particle beam lithography apparatus and charged particle be...

Charged particle beam writing method, and charged particle beam wri...

Charged particle beam drawing apparatus and drawing data generation...

Charged particle beam writing apparatus, and charged particle beam...

Multi charged particle beam writing apparatus, and multi charged pa...

Charged particle beam lithography apparatus and charged particle be...

Charged particle beam writing apparatus and method for acquiring do...

Charged particle beam lithography apparatus, inspection apparatus a...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam pattern forming apparatus and charged particl...

Charged particle beam writing apparatus and method thereof

Charged-particle beam writing method and charged-particle beam writ...

Patents Applicationslast 30 patents

ELECTRON BEAM WRITING METHOD, ELECTRON BEAM WRITING APPARATUS, AND...

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...

WRITING DATA GENERATING METHOD AND MULTI CHARGED PARTICLE BEAM WRIT...

WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...

CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...

WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING...

WRITING DATA GENERATING METHOD AND MULTI CHARGED PARTICLE BEAM WRIT...

ELECTRON BEAM IRRADIATION METHOD, ELECTRON BEAM IRRADIATION APPARAT...

CHARGED PARTICLE BEAM APPARATUS AND POSITIONAL DISPLACEMENT CORRECT...

ELECTRON BEAM APPARATUS AND POSITIONAL DISPLACEMENT CORRECTING METH...

CHARGED PARTICLE BEAM WRITING METHOD, AND CHARGED PARTICLE BEAM WRI...

DRAWING DATA GENERATING METHOD

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...

CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR ACQUIRING DO...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF

CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRIT...