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Noriaki Nakayamada
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Beam shot position correction coefficient computation/updating tech...
Patent number
7,705,327
Issue date
Apr 27, 2010
Nuflare Technology, Inc.
Tomoyuki Horiuchi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
BEAM SHOT POSITION CORRECTION COEFFICIENT COMPUTATION/UPDATING TECH...
Publication number
20080078947
Publication date
Apr 3, 2008
NuFlare Technology, Inc.
Tomoyuki HORIUCHI
B82 - NANO-TECHNOLOGY