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Noriaki Shimizu
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Recovery processing method to be adopted in substrate processing ap...
Patent number
7,960,187
Issue date
Jun 14, 2011
Tokyo Electron Limited
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus, control method for the apparatus, a...
Patent number
7,640,072
Issue date
Dec 29, 2009
Tokyo Electron Limited
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, control method for the apparatus, a...
Patent number
7,455,747
Issue date
Nov 25, 2008
Tokyo Electron Limited
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for processing a substrate and program therefor
Patent number
7,409,253
Issue date
Aug 5, 2008
Tokyo Electron Limited
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Automated semiconductor wafer salvage during processing
Patent number
7,364,922
Issue date
Apr 29, 2008
Tokyo Electron Limited
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
RECOVERY PROCESSING METHOD TO BE ADOPTED IN SUBSTRATE PROCESSING AP...
Publication number
20080223298
Publication date
Sep 18, 2008
TOKYO ELECTRON LIMITED
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD FOR THE APPARATUS, A...
Publication number
20080228311
Publication date
Sep 18, 2008
TOKYO ELECTRON LIMITED
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Recovery processing method to be adopted in substrate processing ap...
Publication number
20060162660
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Application
System and method for processing a substrate and program therefor
Publication number
20060149403
Publication date
Jul 6, 2006
TOKYO ELECTRON LIMITED
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Application
Substrate processing apparatus, control method for the apparatus, a...
Publication number
20050124084
Publication date
Jun 9, 2005
TOKYO ELECTRON LIMITED
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS