Noriaki Tateno

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck module and cooling system
- Patent number 7,615,133
- Issue date Nov 10, 2009
- Toto Ltd.
- Noriaki Tateno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck for an electrically insulative substrate, and a...
- Patent number 7,209,339
- Issue date Apr 24, 2007
- ULVAC, Inc.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Brine supply unit
- Patent number 7,011,744
- Issue date Mar 14, 2006
- Choshu Industry Co., Ltd.
- Tomio Takamura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Electrostatic chuck and processing apparatus for insulative substrate
- Patent number 6,768,627
- Issue date Jul 27, 2004
- Toto Ltd.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic clampless holder module and cooling system
- Publication number 20050127619
- Publication date Jun 16, 2005
- Noriaki Tateno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck for an electrically insulative substrate, and a...
- Publication number 20040218340
- Publication date Nov 4, 2004
- Toto, Ltd.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Brine supply unit
- Publication number 20030209609
- Publication date Nov 13, 2003
- Tomio Takamura
- G05 - CONTROLLING REGULATING