Noriaki YOKONO

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system and ins...
- Patent number 8,477,301
- Issue date Jul 2, 2013
- Sokudo Co., Ltd.
- Masahito Kashiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus control system and substrate process...
- Patent number 6,963,789
- Issue date Nov 8, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tamihiro Bun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmosphere concentration monitoring for substrate processing appara...
- Patent number 6,053,058
- Issue date Apr 25, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Toyohide Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Method of and device for transporting semiconductor substrate in se...
- Patent number 5,436,848
- Issue date Jul 25, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Masami Nishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND INS...
- Publication number 20110063588
- Publication date Mar 17, 2011
- Masahito KASHIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus control system and substrate process...
- Publication number 20030060917
- Publication date Mar 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Tamihiro Bun
- H01 - BASIC ELECTRIC ELEMENTS