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Norihiko AMIKURA
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gate valve and driving method
Patent number
11,994,234
Issue date
May 28, 2024
Tokyo Electron Limited
Norihiko Amikura
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Processing system and transfer method
Patent number
11,955,356
Issue date
Apr 9, 2024
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, vacuum substrate transfer module, and...
Patent number
11,862,506
Issue date
Jan 2, 2024
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer system and load lock module
Patent number
11,791,180
Issue date
Oct 17, 2023
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, pressure control apparatus and substra...
Patent number
11,742,188
Issue date
Aug 29, 2023
Tokyo Electron Limited
Kazuyuki Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer system and atmospheric transfer module
Patent number
11,705,355
Issue date
Jul 18, 2023
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply system and gas supply method
Patent number
11,698,648
Issue date
Jul 11, 2023
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas inspection method, substrate processing method, and substrate p...
Patent number
11,644,121
Issue date
May 9, 2023
Tokyo Electron Limited
Risako Matsuda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Method for calibrating plurality of chamber pressure sensors and su...
Patent number
11,585,717
Issue date
Feb 21, 2023
Tokyo Electron Limited
Risako Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply system, substrate processing apparatus, and control meth...
Patent number
11,538,665
Issue date
Dec 27, 2022
Tokyo Electron Limited
Atsushi Sawachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting and inspection apparatus
Patent number
11,513,541
Issue date
Nov 29, 2022
Tokyo Electron Limited
Atsushi Sawachi
G01 - MEASURING TESTING
Information
Patent Grant
Flow rate measurement apparatus and method for more accurately meas...
Patent number
11,326,914
Issue date
May 10, 2022
Tokyo Electron Limited
Norihiko Amikura
G01 - MEASURING TESTING
Information
Patent Grant
Method of obtaining output flow rate of flow rate controller and me...
Patent number
11,231,313
Issue date
Jan 25, 2022
Tokyo Electron Limited
Norihiko Amikura
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate transfer system and atmospheric transfer module
Patent number
11,227,785
Issue date
Jan 18, 2022
Tokyo Electron Limited
Norihiko Amikura
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Gas supply system and gas supply method
Patent number
10,996,688
Issue date
May 4, 2021
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of determining flow rate of a gas in a substrate processing...
Patent number
10,876,870
Issue date
Dec 29, 2020
Tokyo Electron Limited
Risako Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing system and method of determining flow rate of gas
Patent number
10,871,786
Issue date
Dec 22, 2020
Tokyo Electron Limited
Risako Miyoshi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of inspecting flow rate measuring system
Patent number
10,859,426
Issue date
Dec 8, 2020
Tokyo Electron Limited
Jun Hirose
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of arranging treatment process
Patent number
10,845,119
Issue date
Nov 24, 2020
Tokyo Electron Limited
Jun Hirose
F26 - DRYING
Information
Patent Grant
Method of inspecting gas supply system, method of calibrating flow...
Patent number
10,788,356
Issue date
Sep 29, 2020
Tokyo Electron Limited
Norihiko Amikura
G01 - MEASURING TESTING
Information
Patent Grant
Gas supply system, substrate processing system and gas supply method
Patent number
10,665,430
Issue date
May 26, 2020
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for inspecting for leaks in gas supply system valves
Patent number
10,533,916
Issue date
Jan 14, 2020
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for inspecting shower plate of plasma processing apparatus
Patent number
10,424,466
Issue date
Sep 24, 2019
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting gas supply system
Patent number
10,274,972
Issue date
Apr 30, 2019
Tokyo Electron Limited
Norihiko Amikura
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Gas supply system, gas supply control method and gas replacement me...
Patent number
10,229,844
Issue date
Mar 12, 2019
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preventing explosion of exhaust gas in decompression pro...
Patent number
10,168,049
Issue date
Jan 1, 2019
Tokyo Electron Limited
Norihiko Amikura
G01 - MEASURING TESTING
Information
Patent Grant
Method of calculating output flow rate of flow rate controller
Patent number
10,031,007
Issue date
Jul 24, 2018
Tokyo Electron Limited
Norihiko Amikura
G01 - MEASURING TESTING
Information
Patent Grant
Gas supply control method
Patent number
9,904,299
Issue date
Feb 27, 2018
Tokyo Electron Limited
Kumiko Ono
G05 - CONTROLLING REGULATING
Information
Patent Grant
Bolt-locking apparatus, mounting method thereof and mounting jig
Patent number
9,835,195
Issue date
Dec 5, 2017
Tokyo Electron Limited
Norihiko Amikura
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Bolt-locking apparatus, mounting method thereof and mounting jig
Patent number
9,494,180
Issue date
Nov 15, 2016
Tokyo Electron Limited
Norihiko Amikura
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
Publication number
20240047254
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE
Publication number
20240030011
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASURING SYSTEM, MEASURING DEVICE, AND MEASURING METHOD
Publication number
20230375371
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Takayuki HATANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
Publication number
20230215753
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE AND DRIVING METHOD
Publication number
20230160494
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD
Publication number
20220277981
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
STORAGE CONTAINER AND PROCESSING SYSTEM
Publication number
20220243336
Publication date
Aug 4, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DETECTION DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
Publication number
20220148857
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20220148858
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Daisuke Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM AND TRANSFER METHOD
Publication number
20220130695
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
Publication number
20220130651
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
Publication number
20220093438
Publication date
Mar 24, 2022
TOYOTA ELECTRON LIMITED
Norihiko AMIKURA
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
Publication number
20220080476
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B08 - CLEANING
Information
Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
Publication number
20220068689
Publication date
Mar 3, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
G01 - MEASURING TESTING
Information
Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
Publication number
20220051928
Publication date
Feb 17, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STORAGE MODULE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF TRANSFER...
Publication number
20210398838
Publication date
Dec 23, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM
Publication number
20210343559
Publication date
Nov 4, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
GAS INSPECTION METHOD, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE P...
Publication number
20210301942
Publication date
Sep 30, 2021
TOKYO ELECTRON LIMITED
Risako MATSUDA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, VACUUM SUBSTRATE TRANSFER MODULE, AND...
Publication number
20210287927
Publication date
Sep 16, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
Publication number
20210280441
Publication date
Sep 9, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
Publication number
20210280447
Publication date
Sep 9, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD
Publication number
20210216088
Publication date
Jul 15, 2021
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND CONTROL METH...
Publication number
20210134564
Publication date
May 6, 2021
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, PRESSURE CONTROL APPARATUS AND SUBSTRA...
Publication number
20210050190
Publication date
Feb 18, 2021
TOKYO ELECTRON LIMITED
Kazuyuki MIURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PERFORMANCE CALCULATION METHOD AND PROCESSING APPARATUS
Publication number
20210013012
Publication date
Jan 14, 2021
TOKYO ELECTRON LIMITED
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR CALIBRATING PLURALITY OF CHAMBER PRESSURE SENSORS AND SU...
Publication number
20200292403
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Risako MATSUDA
G01 - MEASURING TESTING
Information
Patent Application
FLOW RATE MEASUREMENT METHOD AND FLOW RATE MEASUREMENT APPARATUS
Publication number
20200278225
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF INSPECTING AND FLOW RATE CONTROLLER
Publication number
20200124456
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD OF INSPECTING AND INSPECTION APPARATUS
Publication number
20200124455
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF DETERMINING FLOW RATE OF GAS
Publication number
20190301912
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Risako MIYOSHI
G01 - MEASURING TESTING