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Norihiko Sasagawa
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical liquid discharge mechanism, liquid processing apparatus, c...
Patent number
10,755,952
Issue date
Aug 25, 2020
Tokyo Electron Limited
Norihiko Sasagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing method and storage medium
Patent number
10,168,618
Issue date
Jan 1, 2019
Tokyo Electron Limited
Norihiko Sasagawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Chemical liquid discharge mechanism, liquid processing apparatus, c...
Patent number
10,074,548
Issue date
Sep 11, 2018
Tokyo Electron Limited
Norihiko Sasagawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
Patent number
9,195,138
Issue date
Nov 24, 2015
Tokyo Electron Limited
Norihiko Sasagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process liquid supply nozzle, process liquid supply device and nozz...
Patent number
7,326,299
Issue date
Feb 5, 2008
Tokyo Electron Limited
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...
Publication number
20180350633
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Norihiko Sasagawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LIQUID PROCESSING METHOD AND STORAGE MEDIUM
Publication number
20160054653
Publication date
Feb 25, 2016
TOKYO ELECTRON LIMITED
Norihiko Sasagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...
Publication number
20160008840
Publication date
Jan 14, 2016
TOKYO ELECTRON LIMITED
Norihiko Sasagawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
Publication number
20120052190
Publication date
Mar 1, 2012
TOKYO ELECTRON LIMITED
Norihiko Sasagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process liquid supply nozzle, process liquid supply device and nozz...
Publication number
20040173153
Publication date
Sep 9, 2004
TOKYO ELECTRON LIMITED
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS