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Norihiko Tsuji
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing device
Patent number
11,527,426
Issue date
Dec 13, 2022
Tokyo Electron Limited
Norihiko Tsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device and substrate transfer method
Patent number
10,867,820
Issue date
Dec 15, 2020
Tokyo Electron Limited
Tsutomu Sakurabayashi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate transfer apparatus and substrate processing system compri...
Patent number
10,811,289
Issue date
Oct 20, 2020
Tokyo Electron Limited
Norihiko Tsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Connecting mechanism and connecting method of substrate container
Patent number
10,134,619
Issue date
Nov 20, 2018
Tokyo Electron Limited
Keisuke Kondoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate valve and substrate processing system
Patent number
9,732,881
Issue date
Aug 15, 2017
Tokyo Electron Limited
Shinji Wakabayashi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Film forming apparatus and vaporizer
Patent number
8,758,511
Issue date
Jun 24, 2014
Tokyo Electron Limited
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Exhaust trap device
Patent number
8,057,564
Issue date
Nov 15, 2011
Tokyo Electron Limited
Norihiko Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Exhaust trap device
Patent number
7,537,628
Issue date
May 26, 2009
Tokyo Electron Limited
Norihiko Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING DEVICE
Publication number
20210111050
Publication date
Apr 15, 2021
TOKYO ELECTRON LIMITED
Norihiko TSUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Transfer Apparatus and Substrate Processing System
Publication number
20190252225
Publication date
Aug 15, 2019
TOKYO ELECTRON LIMITED
Norihiko TSUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
Publication number
20180286715
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Tsutomu Sakurabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONNECTING MECHANISM AND CONNECTING METHOD OF SUBSTRATE CONTAINER
Publication number
20170221743
Publication date
Aug 3, 2017
Keisuke KONDOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE AND SUBSTRATE PROCESSING SYSTEM
Publication number
20160084389
Publication date
Mar 24, 2016
TOKYO ELECTRON LIMITED
Shinji Wakabayashi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
FILM DEPOSITION DEVICE AND SUBSTRATE PROCESSING DEVICE
Publication number
20110265725
Publication date
Nov 3, 2011
TOKYO ELECTRON LIMITED
Norihiko Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION SYSTEM
Publication number
20110226178
Publication date
Sep 22, 2011
TOKYO ELECTRON LIMITED
Norihiko TSUJI
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
EXHAUST TRAP DEVICE
Publication number
20090211213
Publication date
Aug 27, 2009
TOKYO ELECTRON LIMITED
Norihiko Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND TREATING GAS EMITTING MECHANISM
Publication number
20090038548
Publication date
Feb 12, 2009
Tokyo Electron Limited
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Apparatus and Vaporizer
Publication number
20070266944
Publication date
Nov 22, 2007
TOKYO ELECTRON LIMITED
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Exhaust gas collection device
Publication number
20070175188
Publication date
Aug 2, 2007
TOKYO ELECTION LIMITED
Norihiko Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...