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Norihiko Yamamoto

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  • Nirasaki-Shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas supply method using a gas supply system
    • Patent number 7,854,962
    • Issue date Dec 21, 2010
    • Tokyo Electron Limited
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Gas processing apparatus and gas processing method
    • Publication number 20090151639
    • Publication date Jun 18, 2009
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas supply system and proessing system
    • Publication number 20090133755
    • Publication date May 28, 2009
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas supply system and processing system
    • Publication number 20070163713
    • Publication date Jul 19, 2007
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing gas supply mechanism, film forming apparatus and method,...
    • Publication number 20060086319
    • Publication date Apr 27, 2006
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film forming apparatus
    • Publication number 20050120955
    • Publication date Jun 9, 2005
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas treating device and gas treating method
    • Publication number 20050003600
    • Publication date Jan 6, 2005
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...