Norihiro Ito

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 11,322,373
- Issue date May 3, 2022
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,024,518
- Issue date Jun 1, 2021
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and nozzle
- Patent number 10,580,669
- Issue date Mar 3, 2020
- Tokyo Electron Limited
- Tsuyoshi Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of cleaning substrate proces...
- Patent number 10,486,208
- Issue date Nov 26, 2019
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,460,962
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 10,297,473
- Issue date May 21, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Substrate processing system
- Patent number 10,276,425
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 9,953,848
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and re...
- Patent number 9,852,933
- Issue date Dec 26, 2017
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 9,773,687
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,768,039
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus
- Patent number 9,768,010
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,711,380
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Norihiro Ito
- B08 - CLEANING
Information Patent Grant
Liquid process apparatus and liquid process method
- Patent number 9,691,602
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and liquid treatment method
- Patent number 9,640,383
- Issue date May 2, 2017
- Tokyo Electron Limited
- Kazuhiro Aiura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate liquid processing apparatus and method for detecting abno...
- Patent number 9,478,445
- Issue date Oct 25, 2016
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,378,940
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus for separating processing sol...
- Patent number 9,355,871
- Issue date May 31, 2016
- Tokyo Electron Limited
- Jiro Higashijima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid process apparatus and liquid process method
- Patent number 9,177,838
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Norihiro Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,950,414
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Norihiro Ito
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid processing apparatus and method
- Patent number 8,479,753
- Issue date Jul 9, 2013
- Tokyo Electron Limited
- Hiromitsu Nanba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 8,475,668
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,371,318
- Issue date Feb 12, 2013
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,268,087
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment apparatus, treatment method and storage medium
- Patent number 8,210,190
- Issue date Jul 3, 2012
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus
- Patent number 8,201,568
- Issue date Jun 19, 2012
- Tokyo Electron Limited
- Norihiro Ito
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and dr...
- Patent number 8,152,933
- Issue date Apr 10, 2012
- Tokyo Electron Limited
- Hiromitsu Nanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 8,051,862
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and method and computer readable medium
- Patent number 8,043,440
- Issue date Oct 25, 2011
- Tokyo Electron Limited
- Hiromitsu Nanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,042,560
- Issue date Oct 25, 2011
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20180226277
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180221925
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20180185856
- Publication date Jul 5, 2018
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180130677
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE
- Publication number 20180033656
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Tsuyoshi Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING SUBSTRATE PROCES...
- Publication number 20170361364
- Publication date Dec 21, 2017
- TOKYO ELECTRON LIMITED
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170345689
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160148827
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
- Publication number 20150318192
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20150187613
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150090305
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD FOR DETECTING ABNO...
- Publication number 20140261172
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD
- Publication number 20140248774
- Publication date Sep 4, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140137902
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130340796
- Publication date Dec 26, 2013
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD
- Publication number 20130319476
- Publication date Dec 5, 2013
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130284213
- Publication date Oct 31, 2013
- TOKYO ELECTRON LIMITED
- Yosuke Hachiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20130048609
- Publication date Feb 28, 2013
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD
- Publication number 20130014784
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD
- Publication number 20130014786
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20120312332
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING PROGRAM FOR EXE...
- Publication number 20110209560
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20110089137
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20110023909
- Publication date Feb 3, 2011
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and Dr...
- Publication number 20100212701
- Publication date Aug 26, 2010
- Tokyo Electron Limited
- Hiromitsu Nanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100147335
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus and liquid Processing Method
- Publication number 20100144158
- Publication date Jun 10, 2010
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100083986
- Publication date Apr 8, 2010
- TOKYO ELECTRON LIMITED
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS
- Publication number 20100031980
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- B08 - CLEANING
Information Patent Application
TREATMENT APPARATUS, TREATMENT METHOD AND STORAGE MEDIUM
- Publication number 20090056758
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- H01 - BASIC ELECTRIC ELEMENTS

Norihiro Ito

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus and nozzle

Substrate processing apparatus, method of cleaning substrate proces...

Substrate processing apparatus

Liquid processing apparatus

Substrate processing system

Substrate liquid processing apparatus

Substrate processing apparatus, substrate processing method, and re...

Liquid processing apparatus

Substrate processing apparatus

Liquid treatment apparatus

Liquid processing apparatus, liquid processing method and storage m...

Liquid process apparatus and liquid process method

Liquid treatment apparatus and liquid treatment method

Substrate liquid processing apparatus and method for detecting abno...

Substrate processing apparatus and substrate processing method

Substrate liquid processing apparatus for separating processing sol...

Liquid process apparatus and liquid process method

Liquid processing apparatus, liquid processing method, and storage...

Liquid processing apparatus and method

Substrate liquid processing apparatus, substrate liquid processing...

Liquid processing apparatus, liquid processing method, and storage...

Liquid processing apparatus, liquid processing method, and storage...

Treatment apparatus, treatment method and storage medium

Liquid treatment apparatus

Substrate processing apparatus, substrate processing method, and dr...

Liquid processing apparatus and liquid processing method

Cleaning apparatus and method and computer readable medium

Substrate processing apparatus

Patents Applicationslast 30 patents

LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND NOZZLE

SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING SUBSTRATE PROCES...

LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...

SUBSTRATE LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD FOR DETECTING ABNO...

LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD

LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING PROGRAM FOR EXE...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

Substrate Processing Apparatus, Substrate Processing Method, and Dr...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

Liquid Processing Apparatus and liquid Processing Method

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

LIQUID TREATMENT APPARATUS

TREATMENT APPARATUS, TREATMENT METHOD AND STORAGE MEDIUM