Norihiro Itoh

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 11,826,794
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Yuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and method
- Patent number 9,396,975
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and liquid treatment method
- Patent number 9,245,737
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid arm cleaning unit for substrate processing apparatus
- Patent number 9,190,311
- Issue date Nov 17, 2015
- Tokyo Electron Limited
- Jiro Higashijima
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 9,105,671
- Issue date Aug 11, 2015
- Tokyo Electron Limited
- Norihiro Itoh
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Substrate liquid processing apparatus, liquid processing method, an...
- Patent number 9,064,908
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Norihiro Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,865,483
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kazuhiro Aiura
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Liquid treatment apparatus and method
- Patent number 8,607,807
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 8,444,772
- Issue date May 21, 2013
- Tokyo Electron Limited
- Norihiro Itoh
- B08 - CLEANING
Information Patent Grant
Substrate processing method, storage medium storing program for exe...
- Patent number 8,393,227
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Norihiro Itoh
- G01 - MEASURING TESTING
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 8,251,077
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Hidemasa Aratake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and pr...
- Patent number 8,246,759
- Issue date Aug 21, 2012
- Tokyo Electron Limited
- Norihiro Itoh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20240033786
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20220111422
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140352726
- Publication date Dec 4, 2014
- Norihiro Itoh
- B60 - VEHICLES IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140045281
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro AIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS
- Publication number 20130180659
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Norihiro Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20130008872
- Publication date Jan 10, 2013
- TOKYO ELECTRON LIMITED
- Jiro Higashuima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20120312336
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Norihiro ITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD
- Publication number 20120186744
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Jiro HIGASHIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD
- Publication number 20120186607
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Jiro HIGASHIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus and Liquid Processing Method
- Publication number 20120180828
- Publication date Jul 19, 2012
- Jiro HIGASHIJIMA
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20090293914
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Hidemasa ARATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
- Publication number 20090297705
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Norihiro ITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20090205155
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Norihiro ITOH
- B08 - CLEANING

Norihiro Itoh

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Liquid treatment apparatus and method

Liquid treatment apparatus and liquid treatment method

Liquid arm cleaning unit for substrate processing apparatus

Liquid processing apparatus and liquid processing method

Substrate liquid processing apparatus, liquid processing method, an...

Substrate processing apparatus and substrate processing method

Liquid treatment apparatus and method

Liquid processing apparatus

Substrate processing method, storage medium storing program for exe...

Liquid processing apparatus, liquid processing method and storage m...

Substrate processing apparatus, substrate processing method, and pr...

Patents Applicationslast 30 patents

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID TREATMENT APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

LIQUID TREATMENT APPARATUS AND METHOD

LIQUID TREATMENT APPARATUS AND METHOD

Liquid Processing Apparatus and Liquid Processing Method

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...

LIQUID PROCESSING APPARATUS