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Norihiro Tarumoto
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Tokyo-To, JP
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last 30 patents
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Patent Grant
Phase shift photomask, phase shift photomask blank, and process for...
Patent number
5,702,847
Issue date
Dec 30, 1997
Dai Nippon Printing Co., Ltd.
Norihiro Tarumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift photomask and method of producing same
Patent number
5,556,724
Issue date
Sep 17, 1996
Dai Nippon Printing Co., Ltd.
Norihiro Tarumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY