Norihiro Uchida

Person

  • Fujisawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    CVD reactor apparatus

    • Patent number 5,574,247
    • Issue date Nov 12, 1996
    • Hitachi, Ltd.
    • Eisuke Nishitani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...