Norihisa Koga

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate imaging apparatus
- Patent number 11,832,026
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 11,733,612
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Kazuya Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 11,353,792
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Norihisa Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light irradiating device, light irradiating method and recording me...
- Patent number 11,256,172
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate imaging apparatus
- Patent number 10,958,879
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,795,265
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Norihisa Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 10,707,109
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Auxiliary exposure apparatus and exposure amount distribution acqui...
- Patent number 10,642,168
- Issue date May 5, 2020
- Tokyo Electron Limited
- Hideaki Kashiwagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate imaging apparatus
- Patent number 10,523,905
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection apparatus and method for operating the same
- Patent number 9,025,852
- Issue date May 5, 2015
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 8,730,317
- Issue date May 20, 2014
- Tokyo Electron Limited
- Norihisa Koga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for removing coating film
- Patent number 8,257,605
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Shinji Kobayashi
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Laser treatment apparatus
- Patent number 8,088,455
- Issue date Jan 3, 2012
- Tokyo Electron Limited
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processing apparatus and laser processing method
- Patent number 7,919,727
- Issue date Apr 5, 2011
- Tokyo Electron Limited
- Akira Nishiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thin film removing device and thin film removing method
- Patent number 7,879,251
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Shinji Kobayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Laser processing apparatus and laser processing method for cutting...
- Patent number 7,710,582
- Issue date May 4, 2010
- Tokyo Electron Limited
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for removing coating film
- Patent number 7,641,763
- Issue date Jan 5, 2010
- Tokyo Electron Limited
- Shinji Kobayashi
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Laser processing apparatus and laser processing method
- Patent number 7,622,000
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Norihisa Koga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing apparatus and laser processing method
- Patent number 7,518,087
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser treatment apparatus
- Patent number 7,473,321
- Issue date Jan 6, 2009
- Tokyo Electron Limited
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thin film removing device and thin film removing method
- Patent number 7,332,056
- Issue date Feb 19, 2008
- Tokyo Electron Limited
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 7,087,118
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,936,107
- Issue date Aug 30, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus
- Patent number 6,932,868
- Issue date Aug 23, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming unit
- Patent number 6,872,256
- Issue date Mar 29, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus
- Patent number 6,811,613
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming system
- Patent number 6,761,125
- Issue date Jul 13, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,716,478
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,676,757
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming unit
- Patent number 6,616,760
- Issue date Sep 9, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20240022693
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20220317575
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Kazuya IWATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20210185282
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...
- Publication number 20200409269
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20200084422
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200041913
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190361351
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Norihisa Koga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190096730
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUXILIARY EXPOSURE APPARATUS AND EXPOSURE AMOUNT DISTRIBUTION ACQUI...
- Publication number 20180095370
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Hideaki KASHIWAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20170244936
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20120307045
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20120013730
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Norihisa Koga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR REMOVING COATING FILM
- Publication number 20100059087
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER TREATMENT APPARATUS
- Publication number 20090041954
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
THIN FILM REMOVING DEVICE AND THIN FILM REMOVING METHOD
- Publication number 20080105377
- Publication date May 8, 2008
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
- Publication number 20070119837
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Akira NISHIYA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser treatment apparatus
- Publication number 20060205239
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser processing apparatus and laser processing method
- Publication number 20060090848
- Publication date May 4, 2006
- Norihisa Koga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser processing apparatus and laser processing method
- Publication number 20060092990
- Publication date May 4, 2006
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser processing apparatus and laser processing method
- Publication number 20060086459
- Publication date Apr 27, 2006
- Norihisa Koga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20050155550
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING FILM FORMING APPARATUS
- Publication number 20050109274
- Publication date May 26, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for removing coating film
- Publication number 20050067100
- Publication date Mar 31, 2005
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating apparatus and coating method
- Publication number 20040261701
- Publication date Dec 30, 2004
- Shinji Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thin film removing device and thin removing method
- Publication number 20040226916
- Publication date Nov 18, 2004
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20040134425
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming unit
- Publication number 20040094089
- Publication date May 20, 2004
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating film forming apparatus
- Publication number 20030097983
- Publication date May 29, 2003
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming system
- Publication number 20030056722
- Publication date Mar 27, 2003
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming unit
- Publication number 20020124798
- Publication date Sep 12, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Norihisa Koga

Person

Patents Grantslast 30 patents

Substrate imaging apparatus

Substrate processing apparatus and method of processing substrate

Substrate processing apparatus

Light irradiating device, light irradiating method and recording me...

Substrate imaging apparatus

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus

Auxiliary exposure apparatus and exposure amount distribution acqui...

Substrate imaging apparatus

Substrate inspection apparatus and method for operating the same

Substrate processing apparatus, substrate processing method and non...

Apparatus and method for removing coating film

Laser treatment apparatus

Laser processing apparatus and laser processing method

Thin film removing device and thin film removing method

Laser processing apparatus and laser processing method for cutting...

Apparatus and method for removing coating film

Laser processing apparatus and laser processing method

Laser processing apparatus and laser processing method

Laser treatment apparatus

Thin film removing device and thin film removing method

Coating film forming apparatus and coating unit

Coating film forming apparatus and coating unit

Coating film forming apparatus

Film forming unit

Coating film forming apparatus

Coating film forming system

Coating film forming apparatus and coating film forming method

Coating film forming apparatus and coating unit

Film forming unit

Patents Applicationslast 30 patents

SUBSTRATE IMAGING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE IMAGING APPARATUS

LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...

SUBSTRATE IMAGING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

AUXILIARY EXPOSURE APPARATUS AND EXPOSURE AMOUNT DISTRIBUTION ACQUI...

SUBSTRATE IMAGING APPARATUS

SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

APPARATUS AND METHOD FOR REMOVING COATING FILM

LASER TREATMENT APPARATUS

THIN FILM REMOVING DEVICE AND THIN FILM REMOVING METHOD

LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

Laser treatment apparatus

Laser processing apparatus and laser processing method

Laser processing apparatus and laser processing method

Laser processing apparatus and laser processing method

Coating film forming apparatus and coating unit

COATING FILM FORMING APPARATUS

Apparatus and method for removing coating film

Coating apparatus and coating method

Thin film removing device and thin removing method

Coating film forming apparatus and coating unit

Film forming unit

Coating film forming apparatus

Coating film forming system

Film forming unit