Norikazu Baba

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 10,831,098
- Issue date Nov 10, 2020
- Canon Kabushiki Kaisha
- Norikazu Baba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing analysis of pattern defect, imprint apparatus,...
- Patent number 10,672,673
- Issue date Jun 2, 2020
- Canon Kabushiki Kaisha
- Norikazu Baba
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Exposure apparatus, control method thereof, and device fabrication...
- Patent number 9,372,409
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Norikazu Baba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20180364565
- Publication date Dec 20, 2018
- Canon Kabushiki Kaisha
- Norikazu Baba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD OF PERFORMING ANALYSIS OF PATTERN DEFECT, IMPRINT APPARATUS,...
- Publication number 20170263510
- Publication date Sep 14, 2017
- Canon Kabushiki Kaisha
- Norikazu Baba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160354969
- Publication date Dec 8, 2016
- Canon Kabushiki Kaisha
- Norikazu Baba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD THEREOF, AND DEVICE FABRICATION...
- Publication number 20150331327
- Publication date Nov 19, 2015
- Canon Kabushiki Kaisha
- Norikazu Baba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY