TREA

Norikazu Murakami

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  • Nirasaki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,251,011
    • Issue date Aug 28, 2012
    • Tokyo Electron Limited
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 7,527,016
    • Issue date May 5, 2009
    • Tokyo Electron Limited
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20070236148
    • Publication date Oct 11, 2007
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20040035365
    • Publication date Feb 26, 2004
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS