TREA

Norikazu Sugiyama

Follow

Person

  • Yamanashi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,821,377
    • Issue date Nov 23, 2004
    • Tokyo Electron Limited
    • Susumu Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Process apparatus
    • Patent number 6,733,620
    • Issue date May 11, 2004
    • Tokyo Electron Limited
    • Norikazu Sugiyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus for plasma processing
    • Patent number 6,562,186
    • Issue date May 13, 2003
    • Tokyo Electron Limited
    • Susumu Saito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents