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Norinao TAKASU

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,763,087
    • Issue date Sep 1, 2020
    • Tokyo Electron Limited
    • Shuichi Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230317422
    • Publication date Oct 5, 2023
    • TOKYO ELECTRON LIMITED
    • Norinao TAKASU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190096639
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Shuichi TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS