Norio Akutsu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing substrates and method for manuf...
- Patent number 6,927,165
- Issue date Aug 9, 2005
- Hitachi Kokusai Electric, Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for processing substrates and method for manuf...
- Patent number 6,638,860
- Issue date Oct 28, 2003
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for processing substrates and method for manuf...
- Publication number 20040177926
- Publication date Sep 16, 2004
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and a method for fabricating a semic...
- Publication number 20020182870
- Publication date Dec 5, 2002
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing substrates and method for manuf...
- Publication number 20020037645
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric, Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...