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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
11,114,319
Issue date
Sep 7, 2021
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clamp apparatus, substrate carry-in/out apparatus using the same, a...
Patent number
9,857,124
Issue date
Jan 2, 2018
Tokyo Electron Limited
Mitsuru Obara
F27 - FURNACES KILNS OVENS RETORTS
Patents Applications
last 30 patents
Information
Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Publication number
20200168486
Publication date
May 28, 2020
TOKYO ELECTRON LIMITED
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLAMP APPARATUS, SUBSTRATE CARRY-IN/OUT APPARATUS USING THE SAME, A...
Publication number
20160273836
Publication date
Sep 22, 2016
TOKYO ELECTRON LIMITED
Mitsuru Obara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS, METHOD OF INSTALLING SUBSTRATE...
Publication number
20150214080
Publication date
Jul 30, 2015
TOKYO ELECTRON LIMITED
Katsuhiko Oyama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS