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Tochigi, JP
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last 30 patents
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Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
9,198,273
Issue date
Nov 24, 2015
Gigaphoton Inc.
Miwa Igarashi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20140332700
Publication date
Nov 13, 2014
Miwa IGARASHI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING