TREA

Norio Kanai

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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum apparatus
    • Patent number 4,932,357
    • Issue date Jun 12, 1990
    • Hitachi, Ltd.
    • Naoyuki Tamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing unit and apparatus
    • Patent number 4,824,309
    • Issue date Apr 25, 1989
    • Hitachi, Ltd.
    • Yutaka Kakehi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Molecular beam epitaxy apparatus
    • Patent number 4,810,473
    • Issue date Mar 7, 1989
    • Hitachi, Ltd.
    • Naoyuki Tamura
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Plasma etcher having isotropic subchamber with gas outlet for produ...
    • Patent number 4,352,974
    • Issue date Oct 5, 1982
    • Hitachi, Ltd.
    • Tatsumi Mizutani
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ion implanter
    • Patent number 4,274,004
    • Issue date Jun 16, 1981
    • Hitachi, Ltd.
    • Norio Kanai
    • H01 - BASIC ELECTRIC ELEMENTS