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Norio Kobayashi
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Yokosuka, JP
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last 30 patents
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Patent Grant
Process for cleaning the interior of semiconductor substrate
Patent number
6,059,887
Issue date
May 9, 2000
Purex Co., Ltd.
Hisashi Muraoka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor wafer processing apparatus having a Bernoulli chuck
Patent number
5,370,709
Issue date
Dec 6, 1994
Kabushiki Kaisha Toshiba
Norio Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...