Norio Maeda

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Yamatokouriyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for drying substrate
- Patent number 7,377,053
- Issue date May 27, 2008
- Daikin Industries, Ltd.
- Norio Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for drying substrate
- Patent number 6,962,007
- Issue date Nov 8, 2005
- Toho Kasei Ltd.
- Norio Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for drying substrate
- Patent number 6,904,702
- Issue date Jun 14, 2005
- Toho Kasei, Ltd
- Takazo Sotojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for processing wafer
- Patent number 6,589,386
- Issue date Jul 8, 2003
- Toho Kasei Ltd.
- Norio Maeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for drying substrate
- Publication number 20040031168
- Publication date Feb 19, 2004
- Takazo Sotojima
- H01 - BASIC ELECTRIC ELEMENTS