Norio Shiraiwa

Person

Nagano-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 11,862,501
- Issue date Jan 2, 2024
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor/liquid crystal manufacturing...
- Patent number 11,037,811
- Issue date Jun 15, 2021
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holding apparatus and baseplate structure
- Patent number 10,847,401
- Issue date Nov 24, 2020
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate fixture and substrate fixing device
- Patent number 10,600,669
- Issue date Mar 24, 2020
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 10,304,718
- Issue date May 28, 2019
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor-liquid crystal manufacturing...
- Patent number 10,147,628
- Issue date Dec 4, 2018
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tray and wafer holding apparatus
- Patent number 9,837,297
- Issue date Dec 5, 2017
- Shinko Electric Industries Co., Ltd.
- Koki Tamagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method for manufacturing the electrostatic...
- Patent number 9,660,557
- Issue date May 23, 2017
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,252,039
- Issue date Feb 2, 2016
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 9,240,340
- Issue date Jan 19, 2016
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Substrate temperature adjusting-fixing device
- Patent number 8,724,289
- Issue date May 13, 2014
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of manufacturing the same
- Patent number 8,023,246
- Issue date Sep 20, 2011
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,483,256
- Issue date Jan 27, 2009
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
- Publication number 20220084866
- Publication date Mar 17, 2022
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE FIXTURE AND SUBSTRATE FIXING DEVICE
- Publication number 20180247852
- Publication date Aug 30, 2018
- Shinko Electric Industries Co., Ltd.
- NORIO SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HOLDING APPARATUS AND BASEPLATE STRUCTURE
- Publication number 20170372934
- Publication date Dec 28, 2017
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20170069519
- Publication date Mar 9, 2017
- Shinko Electric Industries Co., Ltd.
- NORIO SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAY AND WAFER HOLDING APPARATUS
- Publication number 20150371885
- Publication date Dec 24, 2015
- Shinko Electric Industries Co., Ltd.
- Koki TAMAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR-LIQUID CRYSTAL MANUFACTURING...
- Publication number 20150348814
- Publication date Dec 3, 2015
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20140254061
- Publication date Sep 11, 2014
- SHINKO ELECTRIC INDUSTRIES CO., L TO.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING THE ELECTROSTATIC...
- Publication number 20130308244
- Publication date Nov 21, 2013
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20130286531
- Publication date Oct 31, 2013
- Shinko Electric Industries Co., LTD.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING...
- Publication number 20130048217
- Publication date Feb 28, 2013
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20120287552
- Publication date Nov 15, 2012
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20080278883
- Publication date Nov 13, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080266747
- Publication date Oct 30, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080080118
- Publication date Apr 3, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS

Norio Shiraiwa

Person

Patents Grantslast 30 patents

Electrostatic chuck and substrate fixing device

Electrostatic chuck and semiconductor/liquid crystal manufacturing...

Wafer holding apparatus and baseplate structure

Substrate fixture and substrate fixing device

Electrostatic chuck device

Electrostatic chuck and semiconductor-liquid crystal manufacturing...

Tray and wafer holding apparatus

Electrostatic chuck and method for manufacturing the electrostatic...

Electrostatic chuck apparatus

Electrostatic chuck

Dielectric layer for electrostatic chuck and electrostatic chuck

Substrate temperature adjusting-fixing device

Electrostatic chuck and method of manufacturing the same

Electrostatic chuck

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE

SUBSTRATE FIXTURE AND SUBSTRATE FIXING DEVICE

WAFER HOLDING APPARATUS AND BASEPLATE STRUCTURE

ELECTROSTATIC CHUCK DEVICE

TRAY AND WAFER HOLDING APPARATUS

ELECTROSTATIC CHUCK AND SEMICONDUCTOR-LIQUID CRYSTAL MANUFACTURING...

ELECTROSTATIC CHUCK APPARATUS

DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING THE ELECTROSTATIC...

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING...

SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE

ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK