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Norio Uchihira
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning unit and cleaning method
Patent number
6,261,378
Issue date
Jul 17, 2001
Tokyo Electron Limited
Hiroshi Hashimoto
B08 - CLEANING
Information
Patent Grant
Treatment device
Patent number
6,062,240
Issue date
May 16, 2000
Tokyo Electron Limited
Tetsuya Sada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scrubbing apparatus and scrubbing method
Patent number
6,058,544
Issue date
May 9, 2000
Tokyo Electron Limited
Kimio Motoda
B08 - CLEANING
Information
Patent Grant
Apparatus and method for supplying process solution to surface of s...
Patent number
5,945,161
Issue date
Aug 31, 1999
Tokyo Electron Limited
Hiroshi Hashimoto
H01 - BASIC ELECTRIC ELEMENTS