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Noritaka UCHIDA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for polishing rear surface of substrate, system for polis...
Patent number
9,095,953
Issue date
Aug 4, 2015
Tokyo Electron Limited
Mitsunori Nakamori
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
8,794,250
Issue date
Aug 5, 2014
Tokyo Electron Limited
Takehiko Orii
F26 - DRYING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
8,337,659
Issue date
Dec 25, 2012
Tokyo Electron Limited
Takehiko Orii
F26 - DRYING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
8,137,478
Issue date
Mar 20, 2012
Tokyo Electron Limited
Kenji Sekiguchi
B08 - CLEANING
Information
Patent Grant
Liquid processing method and liquid processing apparatus
Patent number
7,914,626
Issue date
Mar 29, 2011
Tokyo Electron Limited
Noritaka Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
7,806,989
Issue date
Oct 5, 2010
Tokyo Electron Limited
Kenji Sekiguchi
B08 - CLEANING
Information
Patent Grant
Substrate processing method, substrate processing apparatus and com...
Patent number
7,731,799
Issue date
Jun 8, 2010
Tokyo Electron Limited
Takayuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Computer readable storage medium for controlling substrate processi...
Patent number
7,693,597
Issue date
Apr 6, 2010
Tokyo Electron Limited
Mitsunori Nakamori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180200764
Publication date
Jul 19, 2018
TOKYO ELECTRON LIMITED
Shogo Fukui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20130145643
Publication date
Jun 13, 2013
TOKYO ELECTRON LIMITED
Takehiko ORII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for Polishing Rear Surface of Substrate, System for Polis...
Publication number
20110312247
Publication date
Dec 22, 2011
TOKYO ELECTRON LIMITED
Mitsunori Nakamori
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100307543
Publication date
Dec 9, 2010
TOKYO ELECTRON LIMITED
Kenji SEKIGUCHI
B08 - CLEANING
Information
Patent Application
Substrate Processing Method and Substrate Processing Apparatus
Publication number
20070223342
Publication date
Sep 27, 2007
Takehiko Orii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid processing method and liquid processing apparatus
Publication number
20070113872
Publication date
May 24, 2007
TOKYO ELECTRON LIMITED
Noritaka Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method, substrate processing apparatus and com...
Publication number
20070074747
Publication date
Apr 5, 2007
Takayuki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing method and substrate processing apparatus
Publication number
20070017555
Publication date
Jan 25, 2007
Kenji Sekiguchi
B08 - CLEANING
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20060079096
Publication date
Apr 13, 2006
TOKYO ELECTRON LIMITED
Mitsunori Nakamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY