Noritoshi Sakamoto

Person

Shimotsuga-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Evaluation method, exposure method, and method for manufacturing an...
- Patent number 10,545,413
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Bunsuke Takeshita
- G02 - OPTICS
Information Patent Grant
Detecting apparatus, detecting method, computer-readable medium sto...
- Patent number 10,455,160
- Issue date Oct 22, 2019
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Position measurement apparatus and exposure apparatus which measure...
- Patent number 9,400,437
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method of controlling the same and method of ma...
- Patent number 9,097,991
- Issue date Aug 4, 2015
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,036,131
- Issue date May 19, 2015
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, exposure apparatus, and method of man...
- Patent number 8,259,310
- Issue date Sep 4, 2012
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, exposure apparatus, and method of man...
- Patent number 8,149,423
- Issue date Apr 3, 2012
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EVALUATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING AN...
- Publication number 20190361355
- Publication date Nov 28, 2019
- Canon Kabushiki Kaisha
- Bunsuke Takeshita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTING APPARATUS, DETECTING METHOD, PROGRAM, LITHOGRAPHY APPARAT...
- Publication number 20170307985
- Publication date Oct 26, 2017
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS, METHOD OF CONTROLLING THE SAME AND METHOD OF MA...
- Publication number 20130258308
- Publication date Oct 3, 2013
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT APPARATUS AND EXPOSURE APPARATUS WHICH MEASURE...
- Publication number 20130120733
- Publication date May 16, 2013
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20120287412
- Publication date Nov 15, 2012
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MAN...
- Publication number 20120154823
- Publication date Jun 21, 2012
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MAN...
- Publication number 20100245848
- Publication date Sep 30, 2010
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Noritoshi Sakamoto

Person

Patents Grantslast 30 patents

Evaluation method, exposure method, and method for manufacturing an...

Detecting apparatus, detecting method, computer-readable medium sto...

Position measurement apparatus and exposure apparatus which measure...

Exposure apparatus, method of controlling the same and method of ma...

Exposure apparatus and device fabrication method

Position detection apparatus, exposure apparatus, and method of man...

Position detection apparatus, exposure apparatus, and method of man...

Patents Applicationslast 30 patents

EVALUATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING AN...

DETECTING APPARATUS, DETECTING METHOD, PROGRAM, LITHOGRAPHY APPARAT...

EXPOSURE APPARATUS, METHOD OF CONTROLLING THE SAME AND METHOD OF MA...

POSITION MEASUREMENT APPARATUS AND EXPOSURE APPARATUS WHICH MEASURE...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MAN...

POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MAN...