Noritsugu TAKAHASHI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection device
- Patent number 11,276,551
- Issue date Mar 15, 2022
- Hitachi, Ltd.
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring device and measuring method
- Patent number 10,707,047
- Issue date Jul 7, 2020
- HITACHI HIGH-TECH CORPORATION
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,559,450
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,134,558
- Issue date Nov 20, 2018
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam device
- Patent number 9,960,006
- Issue date May 1, 2018
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam device
- Patent number 9,443,695
- Issue date Sep 13, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,312,091
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle instrument
- Patent number 9,230,775
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 9,159,533
- Issue date Oct 13, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle microscope
- Patent number 8,859,962
- Issue date Oct 14, 2014
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microscope
- Patent number 8,841,612
- Issue date Sep 23, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 8,785,890
- Issue date Jul 22, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam device
- Patent number 8,735,814
- Issue date May 27, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect review system and method, and program
- Patent number 8,467,595
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus permitting high resolution and high...
- Patent number 8,431,915
- Issue date Apr 30, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,405,026
- Issue date Mar 26, 2013
- Hitachi High-Technologies Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 8,389,935
- Issue date Mar 5, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection data handling and defect review tool
- Patent number 8,209,135
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Tomohiro Funakoshi
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 8,153,969
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle apparatus, scanning electron microscope, and sampl...
- Patent number 8,026,481
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus for forming a specimen image
- Patent number 7,956,324
- Issue date Jun 7, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,847,249
- Issue date Dec 7, 2010
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 7,462,828
- Issue date Dec 9, 2008
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus using charged particle beam
- Patent number 7,449,690
- Issue date Nov 11, 2008
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor laser diode
- Patent number 6,821,801
- Issue date Nov 23, 2004
- Hitachi, Ltd.
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Device
- Publication number 20210313140
- Publication date Oct 7, 2021
- Kaori BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20200365364
- Publication date Nov 19, 2020
- Hitachi, Ltd
- Atsuko SHINTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200105501
- Publication date Apr 2, 2020
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING DEVICE AND MEASURING METHOD
- Publication number 20190206654
- Publication date Jul 4, 2019
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20190074159
- Publication date Mar 7, 2019
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE-BEAM DEVICE
- Publication number 20170092459
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20170018394
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM DEVICE
- Publication number 20150348747
- Publication date Dec 3, 2015
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150076362
- Publication date Mar 19, 2015
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...
- Publication number 20140326879
- Publication date Nov 6, 2014
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED-PARTICLE MICROSCOPE
- Publication number 20140197313
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20130270435
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...
- Publication number 20130228701
- Publication date Sep 5, 2013
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Microscope
- Publication number 20130126733
- Publication date May 23, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE INSTRUMENT
- Publication number 20120286160
- Publication date Nov 15, 2012
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...
- Publication number 20120280126
- Publication date Nov 8, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED-PARTICLE MICROSCOPE
- Publication number 20120119087
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...
- Publication number 20120004879
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION DATA HANDLING AND DEFECT REVIEW TOOL
- Publication number 20110211060
- Publication date Sep 1, 2011
- Hitachi High-Technologies Corporation
- Tomohiro Funakoshi
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM
- Publication number 20110129142
- Publication date Jun 2, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100059676
- Publication date Mar 11, 2010
- Hitachi High-Technologies Corporation
- Tomoyasu SHOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...
- Publication number 20090256076
- Publication date Oct 15, 2009
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
- Publication number 20090184255
- Publication date Jul 23, 2009
- Hitachi High-Technologies Corporation
- Atsuko FUKADA
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080302962
- Publication date Dec 11, 2008
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080185519
- Publication date Aug 7, 2008
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle apparatus, scanning electron microscope, and sampl...
- Publication number 20070181807
- Publication date Aug 9, 2007
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer inspection data handling and defect review tool
- Publication number 20070105245
- Publication date May 10, 2007
- Hitachi High-Technologies Corporation
- Tomohiro Funakoshi
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection system using charged particle beam
- Publication number 20060243906
- Publication date Nov 2, 2006
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using charged particle beam
- Publication number 20060186351
- Publication date Aug 24, 2006
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS

Noritsugu TAKAHASHI

Person

Patents Grantslast 30 patents

Inspection device

Measuring device and measuring method

Scanning electron microscope

Scanning electron microscope

Charged-particle-beam device

Charged-particle beam device

Charged particle beam apparatus

Charged particle instrument

Charged particle beam apparatus permitting high-resolution and high...

Charged-particle microscope

Charged particle beam microscope

Charged particle beam apparatus permitting high-resolution and high...

Electron beam device

Defect review system and method, and program

Charged particle beam apparatus permitting high resolution and high...

Charged particle beam apparatus

Charged particle beam apparatus permitting high-resolution and high...

Wafer inspection data handling and defect review tool

Inspection method and inspection system using charged particle beam

Charged particle apparatus, scanning electron microscope, and sampl...

Charged particle beam apparatus for forming a specimen image

Charged particle beam apparatus

Inspection method and inspection system using charged particle beam

Inspection method and inspection apparatus using charged particle beam

Manufacturing method of semiconductor laser diode

Patents Applicationslast 30 patents

Charged Particle Beam Device

INSPECTION DEVICE

CHARGED PARTICLE BEAM APPARATUS

MEASURING DEVICE AND MEASURING METHOD

SCANNING ELECTRON MICROSCOPE

CHARGED-PARTICLE-BEAM DEVICE

Scanning Electron Microscope

CHARGED-PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...

CHARGED-PARTICLE MICROSCOPE

ELECTRON BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...

Charged Particle Beam Microscope

CHARGED PARTICLE INSTRUMENT

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...

CHARGED-PARTICLE MICROSCOPE

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...

WAFER INSPECTION DATA HANDLING AND DEFECT REVIEW TOOL

DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle apparatus, scanning electron microscope, and sampl...

Wafer inspection data handling and defect review tool

Inspection method and inspection system using charged particle beam

Inspection method and inspection apparatus using charged particle beam