Noriyuki Harashima

Person

Saitama-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Patent number 7,063,922
- Issue date Jun 20, 2006
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Patent number 7,001,698
- Issue date Feb 21, 2006
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,881,991
- Issue date Apr 19, 2005
- Ulvac Coating Corporation
- Satoshi Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,844,117
- Issue date Jan 18, 2005
- ULVAC Coating Corp.
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HA...
- Patent number 6,685,848
- Issue date Feb 3, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,391,791
- Issue date May 21, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
High selective ratio and high and uniform plasma processing method...
- Publication number 20060124245
- Publication date Jun 15, 2006
- Masashi Kikuchi
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20050011862
- Publication date Jan 20, 2005
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20040101767
- Publication date May 27, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20040094504
- Publication date May 20, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High selective ratio and high and uniform plasma processing method...
- Publication number 20030183599
- Publication date Oct 2, 2003
- Masashi Kikuchi
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020155723
- Publication date Oct 24, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020139476
- Publication date Oct 3, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020136967
- Publication date Sep 26, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Noriyuki Harashima

Person

Patents Grantslast 30 patents

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...

METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HA...

Dry-etching method and apparatus, photomasks and method for the pre...

Patents Applicationslast 30 patents

High selective ratio and high and uniform plasma processing method...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

High selective ratio and high and uniform plasma processing method...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...