Membership
Tour
Register
Log in
Noriyuki Iwabuchi
Follow
Person
Miyagi-gun, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method, system and program
Patent number
8,475,623
Issue date
Jul 2, 2013
Tokyo Electron Limited
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, system and program
Patent number
8,257,601
Issue date
Sep 4, 2012
Tokyo Electron Limited
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, focus ring, and susceptor
Patent number
8,124,539
Issue date
Feb 28, 2012
Tokyo Electron Limited
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure control method and processing device
Patent number
7,553,773
Issue date
Jun 30, 2009
Tokyo Electron Limited
Eiji Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure control method and processing device
Patent number
6,908,864
Issue date
Jun 21, 2005
Tokyo Electron Limited
Eiji Hirose
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20160111304
Publication date
Apr 21, 2016
TOKYO ELECTRON LIMITED
Hiroyuki TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
Publication number
20120292290
Publication date
Nov 22, 2012
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
Publication number
20110171830
Publication date
Jul 14, 2011
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, FOCUS RING, AND SUSCEPTOR
Publication number
20110000883
Publication date
Jan 6, 2011
TOKYO ELECTRON LIMITED
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method, system and program
Publication number
20060090703
Publication date
May 4, 2006
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure control method and processing device
Publication number
20050176258
Publication date
Aug 11, 2005
TOKYO ELECTRON LIMITED
Eiji Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus, focus ring, and susceptor
Publication number
20040261946
Publication date
Dec 30, 2004
TOKYO ELECTRON LIMITED
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure control method
Publication number
20020182878
Publication date
Dec 5, 2002
Eiji Hirose
H01 - BASIC ELECTRIC ELEMENTS