Noriyuki KIKUMOTO

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,850,623
- Issue date Dec 26, 2023
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus
- Patent number 11,823,929
- Issue date Nov 21, 2023
- SCREEN Holdings Co., Ltd.
- Yuzo Uchida
- B08 - CLEANING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,823,921
- Issue date Nov 21, 2023
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,594,436
- Issue date Feb 28, 2023
- SCREEN Holdings Co., Ltd.
- Yuzo Uchida
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus
- Patent number 11,581,208
- Issue date Feb 14, 2023
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,410,865
- Issue date Aug 9, 2022
- SCREEN Holdings Co., Ltd.
- Hiroyuki Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,342,201
- Issue date May 24, 2022
- SCREEN Holdings Co., Ltd.
- Tetsuo Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,315,820
- Issue date Apr 26, 2022
- SCREEN Holdings Co., Ltd.
- Tetsuo Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, transfer module, and coupling module
- Patent number 11,081,376
- Issue date Aug 3, 2021
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,933,448
- Issue date Mar 2, 2021
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,921,057
- Issue date Feb 16, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, processing liquid draining method,...
- Patent number 10,861,717
- Issue date Dec 8, 2020
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,760,852
- Issue date Sep 1, 2020
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,741,422
- Issue date Aug 11, 2020
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,727,090
- Issue date Jul 28, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,636,682
- Issue date Apr 28, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B08 - CLEANING
Information Patent Grant
Substrate processing device which performs processing on substrate
- Patent number 10,573,523
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method of treating substrate, and substrate tre...
- Patent number 10,553,422
- Issue date Feb 4, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,229,846
- Issue date Mar 12, 2019
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,115,623
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 9,947,572
- Issue date Apr 17, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230187245
- Publication date Jun 15, 2023
- SCREEN Holdings Co., Ltd.
- Yuzo UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220165599
- Publication date May 26, 2022
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- F26 - DRYING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20210098270
- Publication date Apr 1, 2021
- SCREEN Holdings Co., Ltd.
- Yuzo UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20210086222
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20210082720
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200365437
- Publication date Nov 19, 2020
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312679
- Publication date Oct 1, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuo ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SEMIC...
- Publication number 20200312697
- Publication date Oct 1, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuo ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20200227285
- Publication date Jul 16, 2020
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER MODULE, AND COUPLING MODULE
- Publication number 20200211870
- Publication date Jul 2, 2020
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING LIQUID DRAINING METHOD,...
- Publication number 20190267260
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262851
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063834
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063833
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- F26 - DRYING
Information Patent Application
DEOXYGENATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190046900
- Publication date Feb 14, 2019
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180350632
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20180169712
- Publication date Jun 21, 2018
- SCREEN Holdings Co., Ltd.
- Shuichi YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180130695
- Publication date May 10, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING DEVICE WHICH PERFORMS PROCESSING ON SUBSTRATE
- Publication number 20180090332
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD OF TREATING SUBSTRATE, AND SUBSTRATE TRE...
- Publication number 20180090308
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170271177
- Publication date Sep 21, 2017
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170040188
- Publication date Feb 9, 2017
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEOXYGENATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160288018
- Publication date Oct 6, 2016
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150279721
- Publication date Oct 1, 2015
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS

Noriyuki KIKUMOTO

Person

Patents Grantslast 30 patents

Substrate treating apparatus and substrate transporting method

Substrate treating apparatus

Substrate processing device and substrate processing method

Substrate treating apparatus

Substrate treating apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus, transfer module, and coupling module

Substrate treatment apparatus and substrate treatment method

Substrate drying method and substrate processing apparatus

Substrate processing apparatus, processing liquid draining method,...

Substrate drying method and substrate processing apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing device which performs processing on substrate

Substrate treatment method of treating substrate, and substrate tre...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SEMIC...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, TRANSFER MODULE, AND COUPLING MODULE

SUBSTRATE PROCESSING APPARATUS, PROCESSING LIQUID DRAINING METHOD,...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

DEOXYGENATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE WHICH PERFORMS PROCESSING ON SUBSTRATE

SUBSTRATE TREATMENT METHOD OF TREATING SUBSTRATE, AND SUBSTRATE TRE...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

DEOXYGENATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS