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Noriyuki Motimaru
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Annaka-city, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor substrate planarization apparatus and planarization m...
Patent number
8,366,514
Issue date
Feb 5, 2013
Okamoto Machine Tool Works, Ltd.
Satoru Ide
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
SEMICONDUCTOR SUBSTRATE PLANARIZATION APPARATUS AND PLANARIZATION M...
Publication number
20110165823
Publication date
Jul 7, 2011
OKAMOTO MACHINE TOOL WORKS, LTD.
Satoru IDE
B24 - GRINDING POLISHING