Noriyuki Nose

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment system
- Patent number 6,018,395
- Issue date Jan 25, 2000
- Canon Kabushiki Kaisha
- Makiko Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical inspection method and apparatus including intensity modulat...
- Patent number 5,861,952
- Issue date Jan 19, 1999
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system and device manufacturing method using the same
- Patent number 5,767,962
- Issue date Jun 16, 1998
- Canon Kabushiki Kaisha
- Masayuki Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Positional deviation measuring device and method for measuring the...
- Patent number 5,751,426
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting foreign matter on a substrate, and an expos...
- Patent number 5,742,386
- Issue date Apr 21, 1998
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for detecting a relative displacement between...
- Patent number 5,610,718
- Issue date Mar 11, 1997
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask manufacturing method and apparatus and device manufacturing me...
- Patent number 5,593,800
- Issue date Jan 14, 1997
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring positional deviation while corre...
- Patent number 5,585,923
- Issue date Dec 17, 1996
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method
- Patent number 5,557,411
- Issue date Sep 17, 1996
- Canon Kabushiki Kaisha
- Sakae Houryu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method for detecting a positional relationship b...
- Patent number 5,495,336
- Issue date Feb 27, 1996
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for inspecting a particle, if any,...
- Patent number 5,486,919
- Issue date Jan 23, 1996
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for detecting the relative positional deviatio...
- Patent number 5,465,148
- Issue date Nov 7, 1995
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus for detecting foreign matter on a surface to b...
- Patent number 5,461,474
- Issue date Oct 24, 1995
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Grant
Light quantity controlling apparatus
- Patent number 5,459,573
- Issue date Oct 17, 1995
- Canon Kabushiki Kaisha
- Naoto Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Length-measuring device and exposure apparatus
- Patent number 5,440,394
- Issue date Aug 8, 1995
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical heterodyne interference measuring apparatus and method, and...
- Patent number 5,432,603
- Issue date Jul 11, 1995
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system
- Patent number 5,379,108
- Issue date Jan 3, 1995
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detector for detecting the position of an object using a d...
- Patent number 5,369,486
- Issue date Nov 29, 1994
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring an interval between two objects
- Patent number 5,343,291
- Issue date Aug 30, 1994
- Canon Kabushiki Kaisha
- Mitsutoshi Ohwada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring method and apparatus for meausring the positional relatio...
- Patent number 5,333,050
- Issue date Jul 26, 1994
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for detecting positional relationship between two objects
- Patent number 5,327,221
- Issue date Jul 5, 1994
- Canon Kabushiki Kaisha
- Kenji Saitoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus
- Patent number 5,319,444
- Issue date Jun 7, 1994
- Canon Kabushiki Kaisha
- Kenji Saitoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring deviation between patterns on a...
- Patent number 5,313,272
- Issue date May 17, 1994
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning detecting method and apparatus
- Patent number 5,294,980
- Issue date Mar 15, 1994
- Canon Kabushiki Kaisha
- Masakazu Matsugu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask for lithography
- Patent number 5,262,257
- Issue date Nov 16, 1993
- Canon Kabushiki Kaisha
- Yasuaki Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus
- Patent number 5,200,800
- Issue date Apr 6, 1993
- Canon Kabushiki Kaisha
- Shigeyuki Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,182,615
- Issue date Jan 26, 1993
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting device employing marks and oblique projection
- Patent number 5,162,656
- Issue date Nov 10, 1992
- Canon Kabushiki Kaisha
- Masakazu Matsugu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,161,176
- Issue date Nov 3, 1992
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus
- Patent number 5,148,037
- Issue date Sep 15, 1992
- Canon Kabushiki Kaisha
- Shigeyuki Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Noriyuki Nose

Person

Patents Grantslast 30 patents

Alignment system

Optical inspection method and apparatus including intensity modulat...

Inspection system and device manufacturing method using the same

Positional deviation measuring device and method for measuring the...

Apparatus for detecting foreign matter on a substrate, and an expos...

Apparatus and method for detecting a relative displacement between...

Mask manufacturing method and apparatus and device manufacturing me...

Method and apparatus for measuring positional deviation while corre...

Position detection method

Position detecting method for detecting a positional relationship b...

Inspection method and apparatus for inspecting a particle, if any,...

Apparatus and method for detecting the relative positional deviatio...

Inspection apparatus for detecting foreign matter on a surface to b...

Light quantity controlling apparatus

Length-measuring device and exposure apparatus

Optical heterodyne interference measuring apparatus and method, and...

Alignment system

Position detector for detecting the position of an object using a d...

Method and apparatus for measuring an interval between two objects

Measuring method and apparatus for meausring the positional relatio...

Device for detecting positional relationship between two objects

Position detecting method and apparatus

Method and apparatus for measuring deviation between patterns on a...

Positioning detecting method and apparatus

Mask for lithography

Position detecting method and apparatus

Exposure apparatus

Position detecting device employing marks and oblique projection

Exposure apparatus

Position detecting method and apparatus