Noriyuki Sakudo

Person

Hitachi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Variable-frequency type radio-frequency quadrupole accelerator incl...
- Patent number 5,506,472
- Issue date Apr 9, 1996
- Hitachi, Ltd.
- Junya Ito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion implanting apparatus
- Patent number 5,349,196
- Issue date Sep 20, 1994
- Hitachi, Ltd.
- Kensuke Amemiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave-powered plasma-generating apparatus and method
- Patent number 5,266,146
- Issue date Nov 30, 1993
- Hitachi, Ltd.
- Yasunori Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External resonance circuit type radio frequency quadrupole accelerator
- Patent number 5,086,256
- Issue date Feb 4, 1992
- The Agency of Industrial Science and Technology
- Katsumi Tokiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave ion source
- Patent number 5,053,678
- Issue date Oct 1, 1991
- Hitachi, Ltd.
- Hidemi Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 4,924,101
- Issue date May 8, 1990
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle accelerator using quadrupole electrodes
- Patent number 4,801,847
- Issue date Jan 31, 1989
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 4,658,143
- Issue date Apr 14, 1987
- Hitachi, Ltd.
- Katsumi Tokiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter
- Patent number 4,633,138
- Issue date Dec 30, 1986
- Hitachi, Ltd.
- Katsumi Tokiguchi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Plasma ion source
- Patent number 4,629,930
- Issue date Dec 16, 1986
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming electrical contact to a semiconductor substrate v...
- Patent number 4,577,396
- Issue date Mar 25, 1986
- Hitachi, Ltd.
- Naoki Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source having improved switching operation from pl...
- Patent number 4,543,465
- Issue date Sep 24, 1985
- Hitachi, Ltd.
- Noriyuki Sakudo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microwave plasma source
- Patent number 4,433,228
- Issue date Feb 21, 1984
- Hitachi, Ltd.
- Shigeru Nishimatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave discharge ion source
- Patent number 4,409,520
- Issue date Oct 11, 1983
- Hitachi, Ltd.
- Hidemi Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma ion source
- Patent number 4,393,333
- Issue date Jul 12, 1983
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma ion source
- Patent number 4,316,090
- Issue date Feb 16, 1982
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus
- Patent number 4,101,411
- Issue date Jul 18, 1978
- Hitachi, Ltd.
- Keizo Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Noriyuki Sakudo

Person

Patents Grantslast 30 patents

Variable-frequency type radio-frequency quadrupole accelerator incl...

Ion implanting apparatus

Microwave-powered plasma-generating apparatus and method

External resonance circuit type radio frequency quadrupole accelerator

Microwave ion source

Charged particle source

Charged particle accelerator using quadrupole electrodes

Ion source

Ion implanter

Plasma ion source

Method of forming electrical contact to a semiconductor substrate v...

Microwave plasma source having improved switching operation from pl...

Microwave plasma source

Microwave discharge ion source

Microwave plasma ion source

Microwave plasma ion source

Plasma etching apparatus