Noriyuki Tanaka

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Measurement method of electron beam current, electron beam writing...
- Patent number 7,425,714
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Makoto Sakakibara
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Measurement method of electron beam current, electron beam writing...
- Publication number 20060060775
- Publication date Mar 23, 2006
- Hitachi High-Technologies Corporation
- Makoto Sakakibara
- G01 - MEASURING TESTING
Information Patent Application
Measurement method of electron beam current, electron beam lithogra...
- Publication number 20060011869
- Publication date Jan 19, 2006
- Noriyuki Tanaka
- B82 - NANO-TECHNOLOGY