Norman E. Hussey

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Middleton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for controlling implant process
- Patent number 9,738,968
- Issue date Aug 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- George M. Gammel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
- Patent number 9,006,692
- Issue date Apr 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Stanislav S. Todorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
- Patent number 8,853,653
- Issue date Oct 7, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Stanislav S. Todorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Predicting dose repeatability in an ion implantation
- Patent number 7,820,987
- Issue date Oct 26, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam current uniformity monitor, ion implanter and related method
- Patent number 7,663,125
- Issue date Feb 16, 2010
- Varian Semiconductor Equipment Associates, Inc.
- William G. Callahan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING IMPLANT PROCESS
- Publication number 20160312357
- Publication date Oct 27, 2016
- George M. Gammel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY
- Publication number 20140326179
- Publication date Nov 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Stanislav S. Todorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREDICTING DOSE REPEATABILITY IN AN ION IMPLANTATION
- Publication number 20090162953
- Publication date Jun 25, 2009
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM CURRENT UNIFORMITY MONITOR, ION IMPLANTER AND RELATED METHOD
- Publication number 20080073584
- Publication date Mar 27, 2008
- William G. Callahan
- H01 - BASIC ELECTRIC ELEMENTS