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Norman H. Pond
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Santa Clara`, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for multi-target sputtering
Patent number
6,635,154
Issue date
Oct 21, 2003
Intevac, Inc.
Paul Markoff Johnson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Method and apparatus for multi-target sputtering
Publication number
20030085114
Publication date
May 8, 2003
Paul Markoff Johnson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...