Nortbert Bowering

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Discharge produced plasma EUV light source
- Patent number 7,291,853
- Issue date Nov 6, 2007
- Cymer, Inc.
- Igor V. Fomenkov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Discharge produced plasma EUV light source
- Publication number 20070023711
- Publication date Feb 1, 2007
- Igor V. Fomenkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR