Nozomi Hirai

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method, plasma etching apparatus, control program an...
- Patent number 7,883,631
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, semiconductor device man...
- Patent number 7,655,572
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and computer-readable storage medium
- Patent number 7,405,162
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Koji Maruyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AN...
- Publication number 20070212887
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AN...
- Publication number 20070197040
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...
- Publication number 20070090093
- Publication date Apr 26, 2007
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method and computer-readable storage medium
- Publication number 20060063385
- Publication date Mar 23, 2006
- TOKYO ELECTRON LIMITED
- Koji Maruyama
- H01 - BASIC ELECTRIC ELEMENTS