Nozomu Hayashi

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 11,841,616
- Issue date Dec 12, 2023
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, method of imprinting, and method of manufacturin...
- Patent number 11,833,737
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method...
- Patent number 10,901,324
- Issue date Jan 26, 2021
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detection device, imprint apparatus, planarization device, detectio...
- Patent number 10,777,440
- Issue date Sep 15, 2020
- Canon Kabushiki Kaisha
- Toshiki Iwai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 10,732,522
- Issue date Aug 4, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 9,703,190
- Issue date Jul 11, 2017
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, and method of manufacturing article
- Patent number 9,261,776
- Issue date Feb 16, 2016
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure method, exposure apparatus, and method of manufacturing de...
- Patent number 8,885,164
- Issue date Nov 11, 2014
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of processing substrate containing mark and me...
- Patent number 8,638,370
- Issue date Jan 28, 2014
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus, and method of manufacturing de...
- Patent number 8,390,809
- Issue date Mar 5, 2013
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Position detector, position detection method, exposure apparatus, a...
- Patent number 8,369,604
- Issue date Feb 5, 2013
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,675,632
- Issue date Mar 9, 2010
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus
- Patent number 7,672,000
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement apparatus, imaging apparatus, exposure apparat...
- Patent number 7,495,780
- Issue date Feb 24, 2009
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position measuring method and apparatus
- Patent number 7,453,570
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mark position measuring method and apparatus
- Patent number 7,310,146
- Issue date Dec 18, 2007
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detecting method and apparatus
- Patent number 7,145,666
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement technique
- Patent number 7,126,670
- Issue date Oct 24, 2006
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focal point position detecting method in semiconductor exposure app...
- Patent number 6,762,825
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
POSITION MEASURING METHOD, METHOD FOR MANUFACTURING ARTICLE, POSITI...
- Publication number 20250085645
- Publication date Mar 13, 2025
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20250044714
- Publication date Feb 6, 2025
- Canon Kabushiki Kaisha
- NOZOMU HAYASHI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240210843
- Publication date Jun 27, 2024
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, METHOD OF IMPRINTING, AND METHOD OF MANUFACTURIN...
- Publication number 20230083496
- Publication date Mar 16, 2023
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210149297
- Publication date May 20, 2021
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...
- Publication number 20190371642
- Publication date Dec 5, 2019
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160299444
- Publication date Oct 13, 2016
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD...
- Publication number 20150325526
- Publication date Nov 12, 2015
- CANON KABUSHIKI KAISHA
- Nozomu HAYASHI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150013559
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...
- Publication number 20130148123
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130056903
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND PRODUCT MANUFACTURING METHOD
- Publication number 20110074064
- Publication date Mar 31, 2011
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD OF PROCESSING SUBSTRATE CONTAINING MARK AND ME...
- Publication number 20100302414
- Publication date Dec 2, 2010
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...
- Publication number 20090219533
- Publication date Sep 3, 2009
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...
- Publication number 20090110264
- Publication date Apr 30, 2009
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POSITION MEASUREMENT APPARATUS, IMAGING APPARATUS, EXPOSURE APPARAT...
- Publication number 20080144047
- Publication date Jun 19, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080130017
- Publication date Jun 5, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK POSITION MEASURING METHOD AND APPARATUS
- Publication number 20080030733
- Publication date Feb 7, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTING METHOD AND APPARATUS
- Publication number 20070019197
- Publication date Jan 25, 2007
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement technique
- Publication number 20050219491
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position measuring method and apparatus
- Publication number 20050030537
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detecting method and apparatus
- Publication number 20040204901
- Publication date Oct 14, 2004
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focal point position detecting method in semiconductor exposure app...
- Publication number 20030053040
- Publication date Mar 20, 2003
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Nozomu Hayashi

Person

Patents Grantslast 30 patents

Imprint apparatus, imprint method, and method of manufacturing article

Imprint apparatus, method of imprinting, and method of manufacturin...

Imprint method, imprint apparatus, and article manufacturing method...

Detection device, imprint apparatus, planarization device, detectio...

Imprint apparatus and article manufacturing method

Imprint method, imprint apparatus, and article manufacturing method

Imprint apparatus, and method of manufacturing article

Exposure method, exposure apparatus, and method of manufacturing de...

Apparatus and method of processing substrate containing mark and me...

Exposure method, exposure apparatus, and method of manufacturing de...

Position detector, position detection method, exposure apparatus, a...

Exposure apparatus and device manufacturing method

Position detecting method and apparatus

Position measurement apparatus, imaging apparatus, exposure apparat...

Mark position measuring method and apparatus

Mark position measuring method and apparatus

Position detecting method and apparatus

Position measurement technique

Focal point position detecting method in semiconductor exposure app...

Patents Applicationslast 30 patents

POSITION MEASURING METHOD, METHOD FOR MANUFACTURING ARTICLE, POSITI...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

IMPRINT APPARATUS, METHOD OF IMPRINTING, AND METHOD OF MANUFACTURIN...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD...

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...

IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND PRODUCT MANUFACTURING METHOD

APPARATUS AND METHOD OF PROCESSING SUBSTRATE CONTAINING MARK AND ME...

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...

POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...

POSITION MEASUREMENT APPARATUS, IMAGING APPARATUS, EXPOSURE APPARAT...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

MARK POSITION MEASURING METHOD AND APPARATUS

POSITION DETECTING METHOD AND APPARATUS

Position measurement technique

Mark position measuring method and apparatus

Position detecting method and apparatus

Focal point position detecting method in semiconductor exposure app...