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Nuoya YANG
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Portland, OR, US
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last 30 patents
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Patent Grant
Trim and deposition profile control with multi-zone heated substrat...
Patent number
12,071,689
Issue date
Aug 27, 2024
Lam Research Corporation
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
Publication number
20240392443
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU CORE PROTECTION IN MULTI-PATTERNING
Publication number
20240355624
Publication date
Oct 24, 2024
LAM RESEARCH CORPORATION
Nuoya Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
Publication number
20220228263
Publication date
Jul 21, 2022
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
Publication number
20220205105
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...