Nuriel Amir

Person

St Yokneam, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Device-like metrology targets
- Patent number 11,709,433
- Issue date Jul 25, 2023
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay targets with orthogonal underlayer dummyfill
- Patent number 10,890,436
- Issue date Jan 12, 2021
- KLA Corporation
- Nuriel Amir
- G01 - MEASURING TESTING
Information Patent Grant
Method of analyzing and utilizing landscapes to reduce or eliminate...
- Patent number 10,831,108
- Issue date Nov 10, 2020
- KLA Corporation
- Tal Marciano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target and process sensitivity analysis to requirements
- Patent number 10,726,169
- Issue date Jul 28, 2020
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process compatible segmented targets and design methods
- Patent number 10,698,321
- Issue date Jun 30, 2020
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology targets with supplementary structures in an intermediate...
- Patent number 10,551,749
- Issue date Feb 4, 2020
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compound imaging metrology targets
- Patent number 10,527,951
- Issue date Jan 7, 2020
- KLA-Tencor Corporation
- Raviv Yohanan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization measurements of metrology targets and corresponding ta...
- Patent number 10,458,777
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Eran Amit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimating and eliminating inter-cell process variation inaccuracy
- Patent number 10,415,963
- Issue date Sep 17, 2019
- KLA-Tencor Corporation
- Tal Marciano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for direct self assembly in target design and...
- Patent number 10,303,835
- Issue date May 28, 2019
- KLA-Tencor Corporation
- Eran Amit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method, system, and user interface for metrology target characteriz...
- Patent number 10,242,290
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Inna Tarshish-Shapir
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
On-product derivation and adjustment of exposure parameters in a di...
- Patent number 10,025,285
- Issue date Jul 17, 2018
- KLA-Tencor Corporation
- Roie Volkovich
- G05 - CONTROLLING REGULATING
Information Patent Grant
Alignment of multi-beam patterning tool
- Patent number 10,008,364
- Issue date Jun 26, 2018
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology targets with filling elements that reduce inaccuracies an...
- Patent number 10,002,806
- Issue date Jun 19, 2018
- KLA-Tencor Corporation
- Nuriel Amir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus measurements using scatterometry metrology
- Patent number 9,934,353
- Issue date Apr 3, 2018
- KLA-Tencor Corporation
- Mohamed El Kodadi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay measurement of pitch walk in multiply patterned targets
- Patent number 9,903,813
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Partly disappearing targets
- Patent number 9,885,961
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-layered target design
- Patent number 9,841,370
- Issue date Dec 12, 2017
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-layered target design
- Patent number 9,810,620
- Issue date Nov 7, 2017
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ metrology
- Patent number 9,760,020
- Issue date Sep 12, 2017
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Producing resist layers using fine segmentation
- Patent number 9,753,364
- Issue date Sep 5, 2017
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scatterometry overlay metrology targets and methods
- Patent number 9,740,108
- Issue date Aug 22, 2017
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for estimating and correcting misregistration target inaccuracy
- Patent number 9,329,033
- Issue date May 3, 2016
- KLA-Tencor Corporation
- Eran Amit
- G01 - MEASURING TESTING
Information Patent Grant
Device correlated metrology (DCM) for OVL with embedded SEM structu...
- Patent number 9,093,458
- Issue date Jul 28, 2015
- KLA-Tencor Corporation
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selective polymer growth on a semiconductor substrate
- Patent number 8,569,103
- Issue date Oct 29, 2013
- Micron Technology, Inc.
- Eyal Bar-sadeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High rate selective polymer growth on a substrate
- Patent number 8,183,085
- Issue date May 22, 2012
- Micron Technology, Inc.
- Eyal Bar-sadeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Partitioning process to improve memory cell retention
- Patent number 8,169,833
- Issue date May 1, 2012
- Micron Technology, Inc.
- Shaul Halabi
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
DEVICE-LIKE METROLOGY TARGETS
- Publication number 20220197152
- Publication date Jun 23, 2022
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE-LIKE METROLOGY TARGETS
- Publication number 20200124981
- Publication date Apr 23, 2020
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device-Like Metrology Targets
- Publication number 20180188663
- Publication date Jul 5, 2018
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF ANALYZING AND UTILIZING LANDSCAPES TO REDUCE OR ELIMINAT...
- Publication number 20160313658
- Publication date Oct 27, 2016
- KLA-Tencor Corporation
- Tal Marciano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Alignment of Multi-Beam Patterning Tool
- Publication number 20160254121
- Publication date Sep 1, 2016
- KLA-Tencor Corporation
- Nuriel Amir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOUND IMAGING METROLOGY TARGETS
- Publication number 20160179017
- Publication date Jun 23, 2016
- KLA-Tencor Corporation
- Raviv YOHANAN
- G02 - OPTICS
Information Patent Application
POLARIZATION MEASUREMENTS OF METROLOGY TARGETS AND CORRESPONDING TA...
- Publication number 20160178351
- Publication date Jun 23, 2016
- KLA-Tencor Corporation
- Eran AMIT
- G01 - MEASURING TESTING
Information Patent Application
FOCUS MEASUREMENTS USING SCATTEROMETRY METROLOGY
- Publication number 20160103946
- Publication date Apr 14, 2016
- KLA-Tencor Corporation
- Mohamed El Kodadi
- G01 - MEASURING TESTING
Information Patent Application
TARGET AND PROCESS SENSITIVITY ANALYSIS TO REQUIREMENTS
- Publication number 20160042105
- Publication date Feb 11, 2016
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ON-PRODUCT DERIVATION AND ADJUSTMENT OF EXPOSURE PARAMETERS IN A DI...
- Publication number 20150301514
- Publication date Oct 22, 2015
- KLA-Tencor Corporation
- Roie VOLKOVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESTIMATING AND ELIMINATING INTER-CELL PROCESS VARIATION INACCURACY
- Publication number 20150292877
- Publication date Oct 15, 2015
- KLA-Tencor Corporation
- Tal Marciano
- G01 - MEASURING TESTING
Information Patent Application
OVERLAY MEASUREMENT OF PITCH WALK IN MULTIPLY PATTERNED TARGETS
- Publication number 20150268164
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Nuriel AMIR
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PRODUCING RESIST LAYERS USING FINE SEGMENTATION
- Publication number 20150268551
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Nuriel AMIR
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DIRECT SELF ASSEMBLY IN TARGET DESIGN AND...
- Publication number 20150242558
- Publication date Aug 27, 2015
- KLA-Tencor Corporation
- Eran AMIT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY TARGETS WITH FILLING ELEMENTS THAT REDUCE INACCURACIES AN...
- Publication number 20150227675
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Nuriel Amir
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-LAYERED TARGET DESIGN
- Publication number 20150153268
- Publication date Jun 4, 2015
- KLA-Tencor Corporation
- Nuriel AMIR
- G01 - MEASURING TESTING
Information Patent Application
SCATTEROMETRY OVERLAY METROLOGY TARGETS AND METHODS
- Publication number 20140351771
- Publication date Nov 27, 2014
- Nuriel Amir
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESS COMPATIBLE SEGMENTED TARGETS AND DESIGN METHODS
- Publication number 20140307256
- Publication date Oct 16, 2014
- Nuriel Amir
- G01 - MEASURING TESTING
Information Patent Application
IN-SITU METROLOGY
- Publication number 20140139815
- Publication date May 22, 2014
- Nuriel Amir
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET CHARACTERIZATION
- Publication number 20140136137
- Publication date May 15, 2014
- KLA-Tencor Corporation
- Inna Tarshish-Shapir
- G01 - MEASURING TESTING
Information Patent Application
DEVICE CORRELATED METROLOGY (DCM) FOR OVL WITH EMBEDDED SEM STRUCTU...
- Publication number 20140065736
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Nuriel Amir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATING AND CORRECTING MISREGISTRATION TARGET INACCURACY
- Publication number 20140060148
- Publication date Mar 6, 2014
- Eran Amit
- G01 - MEASURING TESTING
Information Patent Application
Overlay Targets with Orthogonal Underlayer Dummyfill
- Publication number 20130293890
- Publication date Nov 7, 2013
- KLA-Tencor Corporation
- Nuriel Amir
- G01 - MEASURING TESTING
Information Patent Application
SELECTIVE POLYMER GROWTH ON A SEMICONDUCTOR SUBSTRATE
- Publication number 20120190194
- Publication date Jul 26, 2012
- Eyal Bar-sadeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PARTITIONING PROCESS TO IMPROVE MEMORY CELL RETENTION
- Publication number 20110082964
- Publication date Apr 7, 2011
- Shaul Halabi
- G11 - INFORMATION STORAGE
Information Patent Application
HIGH RATE SELECTIVE POLYMER GROWTH ON A SUBSTRATE
- Publication number 20100243306
- Publication date Sep 30, 2010
- Eyal Bar-sadeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated circuit with embedded contacts
- Publication number 20090302477
- Publication date Dec 10, 2009
- Yakov Shor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Forming memory arrays
- Publication number 20070235776
- Publication date Oct 11, 2007
- Nuriel Amir
- H01 - BASIC ELECTRIC ELEMENTS

Nuriel Amir

Person

Patents Grantslast 30 patents

Device-like metrology targets

Overlay targets with orthogonal underlayer dummyfill

Method of analyzing and utilizing landscapes to reduce or eliminate...

Target and process sensitivity analysis to requirements

Process compatible segmented targets and design methods

Metrology targets with supplementary structures in an intermediate...

Compound imaging metrology targets

Polarization measurements of metrology targets and corresponding ta...

Estimating and eliminating inter-cell process variation inaccuracy

Method and apparatus for direct self assembly in target design and...

Method, system, and user interface for metrology target characteriz...

On-product derivation and adjustment of exposure parameters in a di...

Alignment of multi-beam patterning tool

Metrology targets with filling elements that reduce inaccuracies an...

Focus measurements using scatterometry metrology

Overlay measurement of pitch walk in multiply patterned targets

Feed forward of metrology data in a metrology system

Partly disappearing targets

Multi-layered target design

Multi-layered target design

In-situ metrology

Producing resist layers using fine segmentation

Scatterometry overlay metrology targets and methods

Method for estimating and correcting misregistration target inaccuracy

Device correlated metrology (DCM) for OVL with embedded SEM structu...

Selective polymer growth on a semiconductor substrate

High rate selective polymer growth on a substrate

Partitioning process to improve memory cell retention

Patents Applicationslast 30 patents

DEVICE-LIKE METROLOGY TARGETS

DEVICE-LIKE METROLOGY TARGETS

Device-Like Metrology Targets

METHODS OF ANALYZING AND UTILIZING LANDSCAPES TO REDUCE OR ELIMINAT...

Feed Forward of Metrology Data in a Metrology System

Alignment of Multi-Beam Patterning Tool

COMPOUND IMAGING METROLOGY TARGETS

POLARIZATION MEASUREMENTS OF METROLOGY TARGETS AND CORRESPONDING TA...

FOCUS MEASUREMENTS USING SCATTEROMETRY METROLOGY

TARGET AND PROCESS SENSITIVITY ANALYSIS TO REQUIREMENTS

ON-PRODUCT DERIVATION AND ADJUSTMENT OF EXPOSURE PARAMETERS IN A DI...

ESTIMATING AND ELIMINATING INTER-CELL PROCESS VARIATION INACCURACY

OVERLAY MEASUREMENT OF PITCH WALK IN MULTIPLY PATTERNED TARGETS

PRODUCING RESIST LAYERS USING FINE SEGMENTATION

METHOD AND APPARATUS FOR DIRECT SELF ASSEMBLY IN TARGET DESIGN AND...

METROLOGY TARGETS WITH FILLING ELEMENTS THAT REDUCE INACCURACIES AN...

MULTI-LAYERED TARGET DESIGN

SCATTEROMETRY OVERLAY METROLOGY TARGETS AND METHODS

PROCESS COMPATIBLE SEGMENTED TARGETS AND DESIGN METHODS

IN-SITU METROLOGY

METROLOGY TARGET CHARACTERIZATION

DEVICE CORRELATED METROLOGY (DCM) FOR OVL WITH EMBEDDED SEM STRUCTU...

METHOD FOR ESTIMATING AND CORRECTING MISREGISTRATION TARGET INACCURACY

Overlay Targets with Orthogonal Underlayer Dummyfill

SELECTIVE POLYMER GROWTH ON A SEMICONDUCTOR SUBSTRATE

PARTITIONING PROCESS TO IMPROVE MEMORY CELL RETENTION

HIGH RATE SELECTIVE POLYMER GROWTH ON A SUBSTRATE

Integrated circuit with embedded contacts

Forming memory arrays