Odette Turmel

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Selectivity control in a plasma processing system
- Patent number 8,222,155
- Issue date Jul 17, 2012
- Lam Research Corporation
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for tunably repairing low-k dielectric damage
- Patent number 7,981,699
- Issue date Jul 19, 2011
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for providing uniform removal of organic material
- Patent number 7,534,363
- Issue date May 19, 2009
- Lam Research Corporation
- Rao V. Annapragada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the optimization of ion energy control in a plasma proc...
- Patent number 7,521,362
- Issue date Apr 21, 2009
- Lam Research Corporation
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE
- Publication number 20110244600
- Publication date Oct 6, 2011
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE
- Publication number 20110097821
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVITY CONTROL IN A PLASMA PROCESSING SYSTEM
- Publication number 20080113516
- Publication date May 15, 2008
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for the optimization of ion energy control in a plasma proc...
- Publication number 20060121729
- Publication date Jun 8, 2006
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for providing uniform removal of organic material
- Publication number 20050006346
- Publication date Jan 13, 2005
- Rao V. Annapragada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY