Ofir Aharon

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Yokneam Eililt, IL

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Patents Grantslast 30 patents

Information Patent Grant
Pupil plane calibration for scatterometry overlay measurement
- Patent number 9,909,982
- Issue date Mar 6, 2018
- KLA-Tencor Corporation
- Barak Bringoltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PUPIL PLANE CALIBRATION FOR SCATTEROMETRY OVERLAY MEASUREMENT
- Publication number 20140257734
- Publication date Sep 11, 2014
- KLA-Tencor Corporation
- Barak Bringoltz
- G01 - MEASURING TESTING