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Timrat, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for improved metrology for semiconductor device...
Patent number
12,131,959
Issue date
Oct 29, 2024
KLA Corporation
Liran Yerushalmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for metrology with layer-specific illumination...
Patent number
11,852,590
Issue date
Dec 26, 2023
KLA Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system and method for measuring diagonal diffraction-base...
Patent number
11,353,321
Issue date
Jun 7, 2022
KLA Corporation
Roie Volkovich
G01 - MEASURING TESTING
Information
Patent Grant
Spectral filter for high-power fiber illumination sources
Patent number
11,187,838
Issue date
Nov 30, 2021
KLA Corporation
Andrew V. Hill
G01 - MEASURING TESTING
Information
Patent Grant
High-brightness illumination source for optical metrology
Patent number
11,156,846
Issue date
Oct 26, 2021
KLA Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Nano-structured non-polarizing beamsplitter
Patent number
10,976,562
Issue date
Apr 13, 2021
KLA Corporation
Dmitry Gorelik
G02 - OPTICS
Information
Patent Grant
Method of analyzing and utilizing landscapes to reduce or eliminate...
Patent number
10,831,108
Issue date
Nov 10, 2020
KLA Corporation
Tal Marciano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Localized telecentricity and focus optimization for overlay metrology
Patent number
10,677,588
Issue date
Jun 9, 2020
KLA-Tencor Corporation
Andrew V. Hill
G01 - MEASURING TESTING
Information
Patent Grant
Scanning in angle-resolved reflectometry and algorithmically elimin...
Patent number
10,533,940
Issue date
Jan 14, 2020
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for metrology with layer-specific illumination...
Patent number
10,444,161
Issue date
Oct 15, 2019
KLA-Tencor Corporation
Amnon Manassen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for spectral tuning of broadband light sources
Patent number
10,422,508
Issue date
Sep 24, 2019
KLA-Tencor Corporation
Andrew V. Hill
F21 - LIGHTING
Information
Patent Grant
System and method for generating multi-channel tunable illumination...
Patent number
10,371,626
Issue date
Aug 6, 2019
KLA-Tencor Corporation
Andrew V. Hill
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems for providing illumination in optical metrology
Patent number
10,203,247
Issue date
Feb 12, 2019
KLA-Tencor Corporation
Gregory R. Brady
F21 - LIGHTING
Information
Patent Grant
Scanning in angle-resolved reflectometry and algorithmically elimin...
Patent number
10,126,238
Issue date
Nov 13, 2018
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Scanning in angle-resolved reflectometry and algorithmically elimin...
Patent number
9,958,385
Issue date
May 1, 2018
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Spectral control system
Patent number
9,921,050
Issue date
Mar 20, 2018
KLA-Tencor Corporation
Amnon Manassen
G02 - OPTICS
Information
Patent Grant
Apodization for pupil imaging scatterometry
Patent number
9,784,987
Issue date
Oct 10, 2017
KLA-Tencor Corporation
Andrew V. Hill
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase characterization of targets
Patent number
9,581,430
Issue date
Feb 28, 2017
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Systems for providing illumination in optical metrology
Patent number
9,512,985
Issue date
Dec 6, 2016
KLA-Tencor Corporation
Gregory R. Brady
G02 - OPTICS
Information
Patent Grant
Spectral control system
Patent number
9,341,769
Issue date
May 17, 2016
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Optics symmetrization for metrology
Patent number
9,164,397
Issue date
Oct 20, 2015
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Apodization for pupil imaging scatterometry
Patent number
9,091,650
Issue date
Jul 28, 2015
KLA-Tencor Corporation
Andrew V. Hill
G01 - MEASURING TESTING
Information
Patent Grant
Metrology systems and methods
Patent number
9,080,971
Issue date
Jul 14, 2015
KLA-Tencor Corp.
Daniel Kandel
G01 - MEASURING TESTING
Information
Patent Grant
Metrology systems and methods
Patent number
8,873,054
Issue date
Oct 28, 2014
KLA-Tencor Corp.
Daniel Kandel
G01 - MEASURING TESTING
Information
Patent Grant
Overlay metrology by pupil phase analysis
Patent number
8,582,114
Issue date
Nov 12, 2013
KLA-Tencor Corporation
Amnon Manassen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology systems and methods
Patent number
8,441,639
Issue date
May 14, 2013
KLA-Tencor Corp.
Daniel Kandel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURE...
Publication number
20240093985
Publication date
Mar 21, 2024
KLA Corporation
Nimrod Shuall
G01 - MEASURING TESTING
Information
Patent Application
EXTRA TALL TARGET METROLOGY
Publication number
20230324809
Publication date
Oct 12, 2023
Yoram Uziel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVED METROLOGY FOR SEMICONDUCTOR DEVICE...
Publication number
20220344218
Publication date
Oct 27, 2022
KLA Corporation
Liran Yerushalmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology System and Method for Measuring Diagonal Diffraction-Base...
Publication number
20210389125
Publication date
Dec 16, 2021
KLA Corporation
Roie Volkovich
G01 - MEASURING TESTING
Information
Patent Application
High-Brightness Illumination Source for Optical Metrology
Publication number
20200333612
Publication date
Oct 22, 2020
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
Localized Telecentricity and Focus Optimization for Overlay Metrology
Publication number
20190310080
Publication date
Oct 10, 2019
KLA-Tencor Corporation
Andrew V. Hill
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Nano-Structured Non-Polarizing Beamsplitter
Publication number
20190107727
Publication date
Apr 11, 2019
KLA-Tencor Corporation
Dmitry Gorelik
G02 - OPTICS
Information
Patent Application
Scanning in Angle-Resolved Reflectometry and Algorithmically Elimin...
Publication number
20190094142
Publication date
Mar 28, 2019
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
Spectral Filter for High-Power Fiber Illumination Sources
Publication number
20190033501
Publication date
Jan 31, 2019
KLA-Tencor Corporation
Andrew V. Hill
G02 - OPTICS
Information
Patent Application
Systems and Methods for Metrology with Layer-Specific Illumination...
Publication number
20180292326
Publication date
Oct 11, 2018
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
SCANNING IN ANGLE-RESOLVED REFLECTOMETRY AND ALGORITHMICALLY ELIMIN...
Publication number
20180106723
Publication date
Apr 19, 2018
KLA-Tencor Corporation
Amnon MANASSEN
G01 - MEASURING TESTING
Information
Patent Application
System and Method for Generating Multi-Channel Tunable Illumination...
Publication number
20180052099
Publication date
Feb 22, 2018
KLA-Tencor Corporation
Andrew V. Hill
G01 - MEASURING TESTING
Information
Patent Application
System and Method for Spectral Tuning of Broadband Light Sources
Publication number
20170350575
Publication date
Dec 7, 2017
KLA-Tencor Corporation
Andrew V. Hill
G02 - OPTICS
Information
Patent Application
Systems for Providing Illumination in Optical Metrology
Publication number
20170146399
Publication date
May 25, 2017
KLA-Tencor Corporation
Gregory R. Brady
G02 - OPTICS
Information
Patent Application
METHODS OF ANALYZING AND UTILIZING LANDSCAPES TO REDUCE OR ELIMINAT...
Publication number
20160313658
Publication date
Oct 27, 2016
KLA-Tencor Corporation
Tal Marciano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Spectral Control System
Publication number
20160305766
Publication date
Oct 20, 2016
KLA-Tencor Corporation
Amnon Manassen
G02 - OPTICS
Information
Patent Application
Apodization for Pupil Imaging Scatterometry
Publication number
20150316783
Publication date
Nov 5, 2015
KLA-Tencor Corporation
Andrew V. Hill
G02 - OPTICS
Information
Patent Application
SCANNING IN ANGLE-RESOLVED REFLECTOMETRY AND ALGORITHMICALLY ELIMIN...
Publication number
20150116717
Publication date
Apr 30, 2015
KLA-Tencor Corporation
Amnon MANASSEN
G01 - MEASURING TESTING
Information
Patent Application
Metrology Systems and Methods
Publication number
20150036142
Publication date
Feb 5, 2015
KLA-Tencor Corporation
Daniel Kandel
G01 - MEASURING TESTING
Information
Patent Application
Systems for Providing Illumination in Optical Metrology
Publication number
20140240951
Publication date
Aug 28, 2014
KLA-Tencor Corporation
Gregory R. Brady
G02 - OPTICS
Information
Patent Application
Spectral Control System
Publication number
20140168650
Publication date
Jun 19, 2014
Amnon Manassen
G02 - OPTICS
Information
Patent Application
Apodization for Pupil Imaging Scatterometry
Publication number
20140146322
Publication date
May 29, 2014
Andrew V. Hill
G02 - OPTICS
Information
Patent Application
PHASE CHARACTERIZATION OF TARGETS
Publication number
20140111791
Publication date
Apr 24, 2014
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
Metrology Systems and Methods
Publication number
20130229661
Publication date
Sep 5, 2013
KLA-Tencor Corporation
Daniel Kandel
G01 - MEASURING TESTING
Information
Patent Application
OVERLAY METROLOGY BY PUPIL PHASE ANALYSIS
Publication number
20130044331
Publication date
Feb 21, 2013
KLA-Tencor Corporation
Amnon Manassen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICS SYMMETRIZATION FOR METROLOGY
Publication number
20120033226
Publication date
Feb 9, 2012
KLA-Tencor Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY SYSTEMS AND METHODS
Publication number
20110069312
Publication date
Mar 24, 2011
KLA-Tencor Corporation
Daniel Kandel
G01 - MEASURING TESTING